Lateral phase change memory
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[0017]Referring to FIG. 1, a lateral phase change memory 50 includes a pair of electrodes 20 and 24 spaced by an intervening insulator 22. The electrodes 20 and 24 and the intervening insulator 22 are cup-shaped or U-shaped. The spacing between the electrodes 20 and 24 is determined by the thickness of the insulator 22, which can be precisely controlled and may be very thin. As a result, the threshold voltage of the device 50 may be relatively low.
[0018]An upper contact 44 makes contact to the upper electrode 24 and a lower contact 10 makes contact to the lower electrode 20. A phase change material region 36 is completely encapsulated in insulators 38, 42, 40, 28 and 16. An oxide layer 12 underlies the insulator 16.
[0019]In FIG. 1, the electrodes 20 and 24 are made symmetrically. In particular, they may be made of the same material. Here, both electrodes 20, 24 are deposited before the phase change material 36 deposition and, thus, the electrodes 20, 24 can be prepared at an elevate...
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