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Film thickness measuring device

A thin-film thickness and thin-film technology, which is applied in the field of measuring devices for measuring thin-film thickness, can solve the problem of inability to measure the thickness of the object to be measured, etc.

Inactive Publication Date: 2007-12-19
PRODISC TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In any case, the above three methods can only measure the surface of the object to be measured, but cannot measure the thickness of the object to be measured

Method used

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  • Film thickness measuring device

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Embodiment Construction

[0040] The film thickness measuring device according to the preferred embodiment of the present invention will be described below with reference to the related drawings, wherein the same elements will be described with the same reference symbols.

[0041] Please refer to FIG. 2 , the film thickness measuring device according to a preferred embodiment of the present invention includes a probe 22 , a control unit 26 , a carrying unit 23 , a power supply unit 24 and a detection unit 25 .

[0042] In this embodiment, the probe 22 can be made of tungsten, and the control unit 26 controls a mechanical arm or a stepper to manipulate the displacement of the probe 22 so that the probe 22 can be in contact with a thin film object 21 Not damaged. The carrying unit 23 can be a base made of conductive material such as copper or silver, which carries the thin film object under test 21 and is electrically connected with the thin film object under test 21 and the power supply unit 24; in addi...

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Abstract

This invention refers to a film thickness measurer, which contains a probe, c control unit, a carrier unit, a power supply unit and a detection unit, wherein the control unit controlling probe with the film to be measured, the carrier unit carrying the measured object, the power unit connected with probe and carrier unit, the probe, measured film, carrier unit and power supply unit forming a loop, the detection unit detecting the current of loop e.g. the tunneling current through measured object.

Description

technical field [0001] The invention relates to a measuring device, in particular to a measuring device for measuring film thickness. Background technique [0002] In recent years, with the development of industry, human technology is changing with each passing day, and the thickness of the film has reached the nanometer level. In order to observe and measure various extremely small components, various measurement tools have been developed, for example, a scanning tunneling microscope (Scanning Tunneling Microscope) is one of the measurement tools. [0003] As shown in FIG. 1 , in the scanning tunneling microscope, the probe 11 is placed very close to the surface of the conductive object 12 to be tested, and a very small gap H is maintained. At this time, electrons can tunnel from the tip of the probe 11 to the surface of the conductive object 12 to generate a tunneling effect. Since the probability of electron tunneling has an exponential relationship with the distance be...

Claims

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Application Information

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IPC IPC(8): G01B7/06
Inventor 谢国卿
Owner PRODISC TECH INC