Shutter unit and laser processing device using the same
A shutter and laser beam technology, applied in lasers, laser welding equipment, laser components, etc., can solve the problem that the shutter mechanism is not easy to miniaturize
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[0043] Hereinafter, preferred embodiments of the shutter unit and laser processing apparatus of the present invention will be described in detail with reference to the drawings.
[0044] Such as figure 1 As shown, the laser processing device 1 adjusts the focus P to the inside of the flat processing object S carried on the base 2 and irradiates the laser beam L to form a reformation generated by multiphoton absorption inside the processing object S Area R. The base 2 is movable and rotatable in the up and down and left and right directions. A laser emitting device 6 mainly including a laser head unit 3, an optical system main body 4, and an objective lens unit 5 is provided above the base 2.
[0045] The laser head unit 3 is detachably mounted on the upper end of the optical system main body 4. The laser head unit 3 has an L-shaped cooling jacket 11, and a cooling pipe 12 through which cooling water flows is embedded in a serpentine state in the longitudinal wall 11a of the cooli...
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