Detecting device and machine platform
A detection device and detection machine technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as uneconomical, substrate transfer drop, and huge transformation costs, so as to increase production capacity and reduce reading abnormalities.
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[0027] Please refer to figure 1 and figure 2 For the first embodiment of the present invention, figure 1 is a stereogram, figure 2 Schematic diagram for the reflection principle, and please refer to Figure 3A and Figure 3B , Figure 3A In order to improve the previous label display state diagram, Figure 3B Show state diagram for improved labeling.
[0028] The detection device suitable for detecting marks on the substrate of the present invention includes, in this embodiment: a reflective element 10 , a light emitting element 20 , and an image pickup element 30 .
[0029] In this embodiment, the reflective element 10 is, for example, an electrostatic plate, and includes a fog surface 12 and a reflective surface 14 , the fog surface 12 is used to homogenize the light source, and the reflective surface 14 is used to reflect the light source. Wherein, the fog surface 12 is located on the surface of the electrostatic plate, and the reflective surface 14 is located on t...
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