Method and apparatus for replicating microstructured optical masks
A photomask and microstructure technology, applied in the field of photomask, can solve the problems of shortened lifespan, damage, and wear of the mainboard, and achieve the effect of improving system practicability and reliable process
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[0069] The initial distribution processing stage (a) is clearly shown in these figures. In the initial point application step (a1), a single initial point IP of the fluid to be cured is applied to the support plate TP. Here, the point IP is located at the center of the carrier plate TP.
[0070] In the track assignment step (a2), a plurality of tracks T1, T2... of fluid material are applied to the main plate M. Here, these traces spread from the center of the mainboard to the edge of the mainboard-replicating part of the MF. Here, the trajectories are contiguous.
[0071] In the dispensing step (a3), the required amount of fluid material is applied to the main plate M, here the center of the plate, forming an integral initial fluid portion IF whose vertical apex forms a corresponding point KP. As shown in the figure, the corresponding point KP corresponds to the initial point IP on the carrier plate TP.
[0072]Figure 2A shows a replicating device similar to that shown in ...
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