Solderable top metal for SiC device
A device and welding contact technology, which is applied in the field of solderable contacts, can solve the problems of reducing device reliability and destroying passivation layer, and achieve the effect of reliable terminal and passivation
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[0025] see Figure 1A , which shows a cross-sectional view of a fraction of a semiconductor device 100a according to a preferred embodiment of the present invention (note that Figure 1A The dimensions shown are for example purposes and device 100a is not shown to scale). As an example, device 100a is a SiC Schottky diode with a single ring field plate terminal and a barrier voltage of 600V, and may be a device. Nonetheless, those skilled in the art will appreciate that the invention is not limited to SiC Schottky diodes, nor to these dimensions.
[0026] Such as Figure 1A As shown, device 100 a includes SiC substrate 102 . As an example, the substrate 102 may have the following parameters, but those of ordinary skill in the art will recognize that the invention is not limited to these parameters: Cs bulk 0.019Ω / cm=3E18T×350μ; Epi 7μ doping concentration 9E15 dopant type Nitrogen; and Epi 7 μm. On the top surface of the substrate 102 along the active region 150 is a Schot...
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