Solderable top metal for SiC device

A device and welding contact technology, which is applied in the field of solderable contacts, can solve the problems of reducing device reliability and destroying passivation layer, and achieve the effect of reliable terminal and passivation

Active Publication Date: 2010-01-06
SILICONIX TECH C V
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Over time, these dendrites can damage the passivation layer, reducing device reliability

Method used

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  • Solderable top metal for SiC device
  • Solderable top metal for SiC device
  • Solderable top metal for SiC device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] see Figure 1A , which shows a cross-sectional view of a fraction of a semiconductor device 100a according to a preferred embodiment of the present invention (note that Figure 1A The dimensions shown are for example purposes and device 100a is not shown to scale). As an example, device 100a is a SiC Schottky diode with a single ring field plate terminal and a barrier voltage of 600V, and may be a device. Nonetheless, those skilled in the art will appreciate that the invention is not limited to SiC Schottky diodes, nor to these dimensions.

[0026] Such as Figure 1A As shown, device 100 a includes SiC substrate 102 . As an example, the substrate 102 may have the following parameters, but those of ordinary skill in the art will recognize that the invention is not limited to these parameters: Cs bulk 0.019Ω / cm=3E18T×350μ; Epi 7μ doping concentration 9E15 dopant type Nitrogen; and Epi 7 μm. On the top surface of the substrate 102 along the active region 150 is a Schot...

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Abstract

A silicon carbide device includes at least one power electrode on a surface thereof, a solderable contract formed on the power electrode, and at least one passivation layer that surrounds the solderable contact but is spaced from the solderable contract, thereby forming a gap.

Description

[0001] related application [0002] This application is based on, and claims priority from, U.S. Provisional Application 60 / 620,756, entitled "Solderable Top Metal ForSiC Die," filed October 21, 2004, the claims of priority being made hereby, and the contents of which are hereby Cited as references. technical field [0003] The present invention relates generally to semiconductor devices, and more particularly to solderable contacts for silicon carbide semiconductor devices. Background technique [0004] Silicon carbide (SiC) has become a well-established technology for high-power devices, for example, for the manufacture of advanced devices such as Schottky diodes, transistors JFETs and MOSFETs. In particular, SiC devices can be packaged so that wire bonding, for example, connects the electrodes of the device to the device package lead frame. However, in order to take full advantage of the high performance characteristics of SiC devices, the type of device packaging requi...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): H01L29/15
CPCH01L2924/13091H01L2924/01015H01L2924/01023H01L2924/05042H01L2924/01047H01L2924/01014H01L2924/014H01L24/05H01L2924/10272
InventorR·卡尔塔L·贝莱莫L·梅林
OwnerSILICONIX TECH C V