Miniature ultra-optical spectrum integrated optical filter and its production method

Abstract

The invention discloses a micro ultra-spectrum integrated optical filter and a manufacture method thereof. The invention takes melting quartz or glass, etc., as an optical base plate and is formed by the optical filters, each dimension of which is in a micron magnitude and with various optical characteristics on the base plate in two-dimensional arrangement. The ultra-spectrum integrated optical filter of the invention realizes the integration of the filters with various characteristics on the same base plate by being based on an optical film interference principle, alternately carrying out vacuum evaporation of high and low refractive index materials and the drying etching of a semiconductor and controlling the etching depth by using a self-etching stopping film. The etching technique and self-stopping technology of a semiconductor technique are utilized in the invention for realizing an ultra-spectrum integrated optical filter with a single element smaller than 20 micron and independently designed optical characteristics. The micro ultra-spectrum integrated optical filter has the advantages of simple manufacturing technique and small size, can be combined with an optical imagingsensor to form a light, convenient and compact imaging spectrum apparatus with high distinguishing rate, and can be broadly used in atmosphere, ocean, space exploration and medicinal treatment diagnosing.

Description

technical field [0001] The invention relates to an optical filter and a manufacturing method thereof, in particular to a micro hyperspectral integrated optical filter and a manufacturing method thereof. Background technique [0002] Hyperspectral imager (i.e., imaging spectrometer) is a new generation of optical remote sensor developed on the basis of multispectral remote sensing imaging technology in the 1980s. It can acquire super multi-spectral images of the scene and the target at the same time, select the image that best reflects the characteristics of the target, and use a specific algorithm to mix each image to artificially generate an image, which can significantly improve the accuracy of the target. The contrast of features relative to the environment has broad application prospects in the atmosphere, ocean, space exploration, earth observation, and medical diagnosis. [0003] For imaging spectrometers, the dispersive spectroscopic element is the most critical devi...

AI Technical Summary

Problems solved by technology

This method can use fewer process steps to produce more channels. The disadvantage is that the etching depth is difficult to control and the etching surface is relatively rough. At the same time, since the film structure of all channels is exactly the same except for the thickness of the spacer layer, so The optical characteristics of each channel cannot be independently designed

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