Soldering method, semiconductor module manufacturing method and soldering apparatus
A soldering and soldering technology, applied in semiconductor/solid-state device manufacturing, semiconductor device, printed circuit manufacturing, etc., can solve problems such as complex structure and complex structure
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[0012]
Below, refer to figure 1 ~ Fig. 6 illustrates the first embodiment of the present invention.
Such as figure 1 As shown, a semiconductor module 10 is provided with a circuit substrate 11 and a plurality of semiconductor elements 12 as electronic components. The plurality of semiconductor elements 12 are bonded to the circuit board 11 by soldering.
The circuit substrate 11 is provided with a plurality of (six in this embodiment) ceramic substrates 14 . A metal circuit 13 is provided on the surface of each ceramic substrate 14 . Four semiconductor elements 12 are soldered to each ceramic substrate 14 . On each ceramic substrate 14 , at least three semiconductor elements 12 are provided in a non-aligned state.
[0013]
Such as figure 2 As shown, the circuit substrate 11 includes: a ceramic substrate 14 with a metal circuit 13 on the surface; and a metal radiator 15 fixed on the ceramic substrate 14 by a metal plate 16 . That is, the circuit substrate 11 is a c...
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