Series/parallel connection two-coordinate precise motion locating platform

A technology of precision motion and positioning platform, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as backlash, friction and insufficient stiffness, and achieve compact structure, strong bearing capacity, and reliable connection. Effect
CN101556932AInactive Publication Date: 2009-10-14SOUTHEAST UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
SOUTHEAST UNIV
Publication Date
2009-10-14
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention discloses a series / parallel connection two-coordinate precise motion locating platform which comprises a support platform component, a first linear bearing, a second linear bearing, a base, a first driving supporting link, a second driving supporting link, a working platform, a first connecting hinge lug and a second connecting hinge lug, wherein, the first driving supporting link and the second driving supporting link are respectively connected with the working platform via the first connecting hinge lug and the first linear bearing as well as the second connecting hinge lug and the second linear bearing; the first driving supporting link is connected with the first connecting hinge lug; the first connecting hinge lug is connected with the first bearing body in the first linear bearing; the first bearing pedestal in the first linear bearing is connected with the working platform; the second driving supporting link is connected with the second connecting hinge lug; the second connecting hinge lug is connected with the second bearing body in the second linear bearing; the second bearing pedestal in the second linear bearing is connected with the working platform; and both the support platform component and the first and the second driving supporting links are fixed on the base.
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Description

1. Technical field

[0001] The invention relates to a series-parallel two-coordinate precision motion positioning platform. The configuration principle of the platform is based on a two-degree-of-freedom parallel decoupling mechanism, which belongs to the field of transmission mechanisms. 2. Background technology

[0002] At present, in the industrial fields such as chip packaging, laser processing and photoelectric detection, with the improvement of product performance, quality and manufacturing cycle, the high-speed and high-precision positioning directly related to production efficiency and product quality and The requirements for operating systems and equipment are becoming increasingly prominent. The notable feature of this type of system and equipment is that its motion positioning mechanism not only requires high-speed and high-precision positioning performance, but also requires a large working range, light weight of moving parts, high reliability and low power consum...

Claims

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