Excimer lamp apparatus

An excimer lamp and excimer technology, applied in the field of excimer lamp devices, can solve problems such as inability to uniformly irradiate vacuum ultraviolet light, and achieve the effect of increasing flow rate and uniform pressure

Active Publication Date: 2013-12-04
USHIO DENKI KK
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  • Abstract
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  • Claims
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Problems solved by technology

Therefore, according to the intensity of the vacuum ultraviolet light detected by the optical sensor 105, when the input to control the excimer lamp 101 is performed, the vacuum ultraviolet light exceeding a predetermined value is irradiated on the object W to be irradiated, or it is lower than a predetermined value. The vacuum ultraviolet light below the value is irradiated, and the vacuum ultraviolet light cannot be uniformly irradiated to the irradiated object W

Method used

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  • Excimer lamp apparatus
  • Excimer lamp apparatus
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Embodiment Construction

[0040] use Figure 1 to Figure 6 One embodiment of the present invention will be described.

[0041] figure 1 It is a sectional view showing the overall configuration of the excimer lamp device 1 according to the invention of the present embodiment.

[0042] As shown in the figure, this excimer lamp device 1 has: an excimer lamp 2; an optical sensor 3 ; and a housing 4 for accommodating at least the excimer lamp 2 and the optical sensor 3 . In addition, the detailed configuration and description of the excimer lamp 2 are shown in Figure 8 The structure of is roughly the same, so the description is omitted. In addition, the cross-sectional rectangular shape of the excimer lamp 2 is not limited to a square excimer lamp, and may be a double tube type excimer lamp. In addition, in a square excimer lamp having a rectangular cross-section, the electrodes may be mesh-like electrodes as opposed to each other.

[0043] figure 2 Yes means that the graph will be shown in figu...

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Abstract

PURPOSE: An excimer lamp apparatus can control the measured value change of the ultraviolet ray by the convection of atmosphere by emitting so that the flow of the inactive gas spreads out from the opening of the cylindrical form part to the excimer lamp to the aperture circumference. CONSTITUTION: An optical sensor(3) comprises the light monitor part, and the cylindrical form part and frame part. The light monitor part comprises the photo diode and fluorescent substance. A cylindrical form part(31) comprises the light monitor part and the opening opened to the excimer lamp. The frame part(32) interlinks the light monitor part and cylindrical form part.

Description

technical field [0001] The present invention relates to an excimer lamp device used for ultraviolet irradiation treatment, and more particularly to an excimer lamp device including a photosensor for measuring ultraviolet rays radiated from the excimer lamp. Background technique [0002] In recent years, excimer lamp devices including excimer lamps emitting vacuum ultraviolet light with a wavelength of 200 nm or less, for example, 172 nm vacuum ultraviolet light, have been used in cleaning processes of glass substrates of liquid crystal display panels by ultraviolet irradiation. In these excimer lamp devices, since vacuum ultraviolet light is attenuated in the air, an excimer lamp with The window material formed of quartz glass irradiates the object to be irradiated with vacuum ultraviolet light through the window material. However, the window material made of quartz glass is expensive, so as shown in Patent Document 1, a structure is adopted in which the window material mad...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J65/00G01J1/00H05B41/36
CPCH01J5/50H01J9/247H01J61/305H01J61/35H01J65/046
Inventor 大塚优一山森贤治
Owner USHIO DENKI KK
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