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Diamond surface chemical mechanical combined machining method and device thereof

A technology of surface chemistry and polishing device, applied in the field of mechanical processing, to achieve the effect of improving efficiency, smooth grinding process and high processing quality

Inactive Publication Date: 2012-03-21
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The purpose of the present invention is to propose a new diamond chemical mechanical compound grinding method for the existing diamond grinding and polishing technology with complex equipment, low efficiency and low processing quality. Polishing process method and device to improve the efficiency and quality of diamond film grinding and polishing

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  • Diamond surface chemical mechanical combined machining method and device thereof
  • Diamond surface chemical mechanical combined machining method and device thereof
  • Diamond surface chemical mechanical combined machining method and device thereof

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[0025] specific implementation plan

[0026] The invention relates to a chemical-mechanical composite grinding and polishing method for diamond surfaces, which is especially suitable for grinding and polishing the surface of single crystal diamond, PCD (polycrystalline diamond) composite sheet, and CVD diamond film. It is characterized in that composite materials are used as grinding, The polished tool grinding disc is heated to an appropriate temperature and then rotated at a high speed; the diamond film / block to be processed is pressed against the surface of the grinding disc with a certain pressure to cause high-speed friction with the grinding disc surface, and the chemical-mechanical Composite cycle effect realizes high-efficiency grinding and polishing of diamond surface.

[0027] The chemical-mechanical composite cycle action refers to: the grinding and polishing process includes the soft phase (copper) catalyzed diamond surface graphitization process (100) and the hard...

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Abstract

The invention relates to a diamond surface chemical mechanical combined grinding and polishing method. Composite material is adopted as a tool millstone used for grinding and polishing, the tool millstone is heated to appropriate temperature, and then high speed rotational motion is carried out; certain pressure is utilized to press a diamond film / block to be processed onto the surface of the millstone, so that high speed friction is produced between the diamond film / block and the surface of the millstone, and high efficiency grinding and polishing on the surface of the diamond is realized under the chemical-mechanical combined circulation action of friction region. The method adopts a chemical-mechanical combined way, and the grinding process includes a catalytic surface graphitizing process and a mechanical graphite scraping process. In the combined circulation process of chemical action and mechanical action, diamond surface material is efficiently removed. The related device integrates heating and loading functions, a combined millstone is used as a tool millstone, and the beneficial effects include that processing efficiency is high, mechanical acting force is small and processing quality is good. The invention also relates to a diamond surface chemical mechanical combined grinding and polishing device.

Description

[0001] Field [0002] The invention relates to a diamond surface grinding and polishing method and device, belonging to the field of mechanical processing. technical background [0003] Diamond has excellent mechanical and chemical properties, and is an ideal tool material. In recent years, tool materials including CVD diamond film, single crystal diamond, and polycrystalline diamond (PCD) composite sheet have been widely used in aviation, aerospace, automobile, electronics, stone and other fields. Especially with the rapid development of ultra-precision machining technology, all kinds of diamonds, as important cutting tool materials, occupy an irreplaceable position in the field of ultra-precision cutting. Therefore, the processing technology of diamond tool materials is very important in the development and application of diamond tools. Especially the surface grinding and polishing technology of CVD diamond film, single crystal diamond sheet, and PCD composite sheet direc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/24B24B37/00
Inventor 李亮何宁卞荣赵威杨吟飞赵孟吴昊危卫华
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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