Miniature ionizing gas analyzer, miniature gas ionizing device and manufacturing method thereof

Abstract

The invention discloses a miniature ionizing gas analyzer, a miniature gas ionizing device and a manufacturing method thereof, which bring convenience to the field detection of a gas. The miniature gas ionizing device provided by the invention comprises a cathode, an anode, and a gas flowing-in/out channel formed between the cathode and the anode, wherein a micro-tip array is formed on or electrically connected to the anode. The miniature ionizing gas analyzer provided by the invention consists of the miniature gas ionizing device, a galvanometer and an adjustable DC voltage source, wherein the miniature gas ionizing device comprises the cathode, the anode, and the gas flowing-in/out channel formed between the cathode and the anode; the micro-tip array is also formed on or electrically connected to the anode; the anode and the cathode of the miniature gas ionizing device are connected with a positive electrode and a negative electrode of the adjustable DC voltage source; and the galvanometer is connected in series between the miniature gas ionizing device and the adjustable DC voltage source.

Description

technical field [0001] The invention relates to a miniature ionization gas analyzer, a miniature gas ionization device and a manufacturing method thereof. Background technique [0002] Gas detection technology has very important applications in industrial production, environmental protection, and anti-terrorism security. Gas detection technology can be divided into two categories: sensor technology and analytical instrument technology. [0003] The gas sensor consists of a chemical sensitive layer and a physical sensor. It has the advantages of small size, low energy consumption, and fast response, and can be used for on-site real-time gas detection. Due to certain selectivity, gas sensors can usually only detect one or a type of gas. Gas sensors are easily affected by factors such as humidity, temperature, and non-detected gases, so there is generally a problem of low accuracy. [0004] Analytical instruments can provide certain physical energy, such as light, heat, soun...

AI Technical Summary

Problems solved by technology

However, the existing analytical instruments usually have problems such as bulky, complicated operation, and high working conditions, which are not suitable for on-site gas detection

For example, the working voltage of the existing ionized gas analyzer is usually above 500V, and the existence of high-voltage power supply greatly restricts the application of this gas analyzer.

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