ICP-MS (Inductively Coupled Plasma-Mass Spectrometry) online sampling device and online monitoring method of metal impurities
A technology of ICP-MS and sampling device, which is applied in the field of semiconductor integrated circuit manufacturing, can solve the problems of chemical system pollution, result deviation, etc., and achieve the effect of cost saving
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Embodiment 1
[0035] Please refer to figure 1 , figure 1 The structural diagram of the ICP-MS online sampling device provided for the first embodiment of the present invention, such as figure 1 As shown, the ICP-MS online sampling device includes: a frame 100, a pipeline connection system 200 arranged in the frame 100 and a pipeline control system, and the pipeline connection system 200 is connected to the chemical system 300 to be tested The ICP-MS sampling needle 401 is connected to the ICP-MS analyzer 400 , and the pipeline control system controls the pipeline connection system 200 .
[0036] Wherein, the pipeline connection system 200 includes a blank verification pipeline system and a chemical test pipeline system, and the blank verification pipeline system includes a first valve V1, a fourth valve V4, a water tank 203, and a fifth valve connected in sequence through pipelines. Valve V5 and the first connector 204, the first valve V1 is connected to an ultrapure water system 301, the...
Embodiment 2
[0053] Please refer to Figure 2 to Figure 3 ,in, figure 2 The top view of the ICP-MS online sampling device provided for the second embodiment of the present invention, image 3 The structural representation of the pipeline connection system of the ICP-MS online sampling device provided for the second embodiment of the present invention, as Figure 2 to Figure 3 As shown, the ICP-MS online sampling device includes: a frame 100, a pipeline connection system 200, a pipeline control system, a sample tray 600 and a rotating lifting rod 700, and the pipeline connection system 200, the pipeline control system, and the sample tray 600 and the rotating lifting rod 700 are arranged in the frame 100, and the pipeline connection system 200 connects the chemical system 300 to be tested and the ICP-MS sampling needle 401, and the ICP-MS sampling needle 401 and the ICP - The MS analyzer 400 is connected, the pipeline control system controls the pipeline connection system 200, a pluralit...
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