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Device for homogenizing laser radiation

A laser radiation and homogenization technology, applied in optics, condensers, optical components, etc., can solve the problems of large loss, expensive structure, and the angle distribution cannot be homogenized, and achieve the effect of fewer parts and improved optical path difference.

Active Publication Date: 2013-10-23
LIMO GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0007] The disadvantage of such a device is that only one lens array is provided for homogenization, so that the laser light can only be homogenized with respect to its spatial distribution, but not with respect to its angular distribution
However, such devices are relatively expensive to construct and can have greater losses due to multiple refractive and reflective surfaces

Method used

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  • Device for homogenizing laser radiation
  • Device for homogenizing laser radiation
  • Device for homogenizing laser radiation

Examples

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Embodiment Construction

[0036] according to figure 1 An embodiment of the invention has successively in the direction of propagation of the laser radiation 1 to be homogenized, a stepped mirror 2 , an array 3 of lens elements 4 and a lens 5 positioned in a Fourier arrangement.

[0037] The stepped mirror 2 has a plurality of reflective flat mirror elements 6 separated from one another by steps 7 . Via the mirror elements 6 , the laser radiation 1 is divided into a number of sub-beams 8 corresponding to the number of mirror elements 6 . Therein, mirror element 6 , which is laterally delimited by steps 7 , serves as an entrance pupil for laser radiation 1 with sharp sides.

[0038] This is particularly advantageous since the step 7 encloses another angle, in the exemplary embodiment shown, an angle of 0° or 180° to the incident laser radiation 1 . Thus, the steps do not deflect the laser radiation in the direction of the array 3 .

[0039] The mirror elements 6 are each aligned at an angle of 45° re...

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Abstract

A device for homogenizing laser radiation contains a plurality of mirror elements which are arranged offset with respect to one another and at which the laser radiation to be homogenized can be reflected in such a way that it is split into a plurality of partial beams corresponding to the number of mirror elements. The partial beams have a path difference with respect to one another as a result of the reflection. The device further has a plurality of lens elements, each of which is respectively assigned to one of the mirror elements in such a way that a respective one of the partial beams can pass through one of the lens elements. A distance between each of the mirror elements and the lens elements assigned thereto is equal to the focal length of the respective lens element.

Description

technical field [0001] The invention relates to a device for homogenizing laser radiation. Background technique [0002] definition: [0003] In the direction of propagation of the light to be influenced is meant the intermediate direction of propagation of the light, especially when the light is not a plane wave or when the light is at least partially converging or diverging. In the absence of an express statement to the contrary, laser beams, sub-beams or beams are not idealized beams of geometrical optics, but actual beams, e.g. the beam cross-section is not infinitely small but extended with a Gaussian Contours of laser beams. [0004] European patent application EP1489438A1 discloses a device for homogenizing laser radiation. The device described therein comprises two homogenizer stages arranged one behind the other in the direction of propagation of the radiation. Each of these stages includes a substrate having an array of cylindrical lenses on the entrance face a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/09
CPCG02B27/0966G02B27/0927G02B19/0052G02B19/0014
Inventor A·米哈伊洛夫Y·科罗图史金
Owner LIMO GMBH
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