Device for homogenizing laser radiation
A laser radiation and homogenization technology, applied in optics, condensers, optical components, etc., can solve the problems of large loss, expensive structure, and the angle distribution cannot be homogenized, and achieve the effect of fewer parts and improved optical path difference.
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[0036] according to figure 1 An embodiment of the invention has successively in the direction of propagation of the laser radiation 1 to be homogenized, a stepped mirror 2 , an array 3 of lens elements 4 and a lens 5 positioned in a Fourier arrangement.
[0037] The stepped mirror 2 has a plurality of reflective flat mirror elements 6 separated from one another by steps 7 . Via the mirror elements 6 , the laser radiation 1 is divided into a number of sub-beams 8 corresponding to the number of mirror elements 6 . Therein, mirror element 6 , which is laterally delimited by steps 7 , serves as an entrance pupil for laser radiation 1 with sharp sides.
[0038] This is particularly advantageous since the step 7 encloses another angle, in the exemplary embodiment shown, an angle of 0° or 180° to the incident laser radiation 1 . Thus, the steps do not deflect the laser radiation in the direction of the array 3 .
[0039] The mirror elements 6 are each aligned at an angle of 45° re...
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