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Method for preparation and test of reference substance for airborne molecular contamination test and apparatus thereof

A technology for gaseous molecules and pollutants, which is used in measurement devices, material separation, and analysis of materials. It can solve the problems of long operation time, high price, and not particularly ideal, and achieve the effect of solving drawbacks and saving costs.

Active Publication Date: 2015-05-20
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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Problems solved by technology

[0008] However, the above-mentioned method also has some disadvantages. First, the equipment is expensive and requires auxiliary equipment such as inert gas cylinders, flow meters, etc.
And the operation time is relatively long, the data stability is relatively good but not particularly ideal

Method used

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  • Method for preparation and test of reference substance for airborne molecular contamination test and apparatus thereof
  • Method for preparation and test of reference substance for airborne molecular contamination test and apparatus thereof
  • Method for preparation and test of reference substance for airborne molecular contamination test and apparatus thereof

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Embodiment Construction

[0023] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0024] figure 1 A flow chart of the method for preparing and testing gaseous molecular level pollutant standards according to a preferred embodiment of the present invention is schematically shown. figure 2 A schematic block diagram of a gaseous molecular level pollutant testing device according to a preferred embodiment of the present invention is schematically shown.

[0025] Such as figure 1 As shown, the gaseous molecular level pollutant standard preparation and testing method according to the preferred embodiment of the present invention include:

[0026] The first step S1, wherein the liquid standard is injected into the sample tube 10 of the thermal desorption system 1 (such as image 3 As shown), it is ensured that the adsorbent is c...

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Abstract

The invention provides a method for the preparation and the test of a reference substance for the airborne molecular contamination test and an apparatus thereof. The method for the preparation and the test of the reference substance for the airborne molecular contamination test comprises the following steps: 1, injecting a preset amount of a liquid reference substance into a sample tube of a thermal desorption system, especially limiting the position of an injection point, the position of an adsorbent in the sample tube and the position of a first transmission conduit, and heating the sample tube; 2, transmitting the gasified liquid reference substance to a cold sample injection system from the thermal desorption system by the first transmission conduit; 3, afresh adsorbing the gasified liquid reference substance by the cold sample injection system; and 4, heating the cold sample injection system, and transmitting the regasified liquid reference substance to a gas chromatography-mass spectrometer (GC-MS) from the cold sample injection system by a second transmission conduit. The whole method of the invention allows the preparation and the test of the reference substance to be carried out through the self structure and the self function of the test apparatus.

Description

technical field [0001] The present invention relates to the standard product preparation and testing method and equipment of gaseous molecular level pollutant (AMC) test, more specifically the present invention relates to a kind of standard product preparation and testing method and equipment of total volatile organic compound test. Background technique [0002] The control of gaseous molecular pollutants AMC (Airborne molecular contamination) is very important for environmental protection, high-tech manufacturing industries such as semiconductors, and construction industries. Among them, total volatile organic compounds (TVOC) are the most serious of the three types of pollution that affect indoor air quality. More specifically, TVOC refers to an organic substance whose saturated vapor pressure exceeds 133.32Pa at room temperature. Its boiling point is between 50°C and 250°C. It can evaporate in the air at room temperature. Its toxicity, irritation, and carcinogenicity And...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N30/02G01N30/06
Inventor 吴显欣傅蓓芬
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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