Dynamic balance method for magnetic suspension molecular pump

A molecular pump and magnetic levitation technology, applied in pump control, non-variable-capacity pump, machine/engine, etc., can solve problems such as low efficiency and cumbersome steps, and achieve the effect of simplifying operation steps, easy operation and improving efficiency

Active Publication Date: 2014-06-25
KYKY TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The technical problem to be solved by the present invention is that the dynamic balancing method of the magnetic levitation molecular pump in the prior art has cumbersome steps and low efficiency. Therefore, it provides a method that can directly perform dynamic balancing operation on the rotor of the magnetic levitation molecular pump at high speed, with simple steps and high efficiency. Dynamic Balancing Method of Magnetic Suspension Molecular Pump

Method used

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  • Dynamic balance method for magnetic suspension molecular pump
  • Dynamic balance method for magnetic suspension molecular pump
  • Dynamic balance method for magnetic suspension molecular pump

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Embodiment Construction

[0051] Such as figure 1 As shown, it is a structural schematic diagram of the magnetic levitation molecular pump involved in the present invention. The magnetic levitation molecular pump in this embodiment is vertically arranged, and the magnetic levitation molecular pump includes a pump body 3 and a rotor shaft arranged in the pump body 3. system, and other structures that the magnetic levitation molecular pump should have in the prior art, since the present invention does not involve the above other structures, they will not be repeated here.

[0052] The rotor shaft system includes a rotor, a first radial magnetic bearing 6, a second radial magnetic bearing 9, a first axial magnetic bearing 13 and a second axial magnetic bearing 15; the rotor includes a rotor shaft 7, and the The impeller 1 fixed by the rotor shaft 7, and the assembly parts used to fix the impeller 1, such as screws, nuts, etc.

[0053] The axis of the rotor shaft 7 is arranged along the vertical direction...

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Abstract

A dynamic balance method for a magnetic suspension molecular pump is provided. After a motor of the magnetic suspension molecular pump is started, a force freedom imbalance vibration control module is started. If imbalance mass on a rotor enables the maximum radial amplitude of the rotor in speed accelerating process not to be one second larger than a protective gap under the control of the force freedom imbalance vibration control module, the imbalance vibration control module can inhabit same frequency vibration of the rotor and enable the speed of the rotor to be quickly larger than rigid critical speed of the rotor, thereby performing dynamic balance operation on the rotor of the magnetic suspension molecular pump at superhigh speed. The dynamic balance method for the magnetic suspension molecular pump can directly perform dynamic balance operation on the rotor of the magnetic suspension molecular pump at superhigh speed, and has simple procedures and high efficiency.

Description

technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a method for dynamic balancing of a magnetic levitation molecular pump. Background technique [0002] Molecular pump is a kind of vacuum pump, which uses high-speed rotating rotor impeller to transfer momentum to gas molecules to obtain directional speed, so that the gas is compressed and driven to the exhaust port, and then pumped away by the backing pump . The magnetic levitation molecular pump is a molecular pump that uses magnetic bearings (also known as active magnetic levitation bearings) as the molecular pump rotor support. Contact has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no need for lubrication. At present, magnetic levitation molecular pumps are widely used in the fields of obtaining high vacuum and high cleanliness vacuum environments. [0003] The internal structure of the mag...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D27/00
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH
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