Dynamic balance method for magnetic suspension molecular pump

A molecular pump and magnetic levitation technology, applied in pump control, non-variable-capacity pump, machine/engine, etc., can solve problems such as low efficiency and cumbersome steps, and achieve the effect of simplifying operation steps, easy operation and improving efficiency
CN102444607BActive Publication Date: 2014-06-25KYKY TECH +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
KYKY TECH
Publication Date
2014-06-25

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Abstract

A dynamic balance method for a magnetic suspension molecular pump is provided. After a motor of the magnetic suspension molecular pump is started, a force freedom imbalance vibration control module is started. If imbalance mass on a rotor enables the maximum radial amplitude of the rotor in speed accelerating process not to be one second larger than a protective gap under the control of the force freedom imbalance vibration control module, the imbalance vibration control module can inhabit same frequency vibration of the rotor and enable the speed of the rotor to be quickly larger than rigid critical speed of the rotor, thereby performing dynamic balance operation on the rotor of the magnetic suspension molecular pump at superhigh speed. The dynamic balance method for the magnetic suspension molecular pump can directly perform dynamic balance operation on the rotor of the magnetic suspension molecular pump at superhigh speed, and has simple procedures and high efficiency.
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Description

technical field

[0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a method for dynamic balancing of a magnetic levitation molecular pump. Background technique

[0002] Molecular pump is a kind of vacuum pump, which uses high-speed rotating rotor impeller to transfer momentum to gas molecules to obtain directional speed, so that the gas is compressed and driven to the exhaust port, and then pumped away by the backing pump . The magnetic levitation molecular pump is a molecular pump that uses magnetic bearings (also known as active magnetic levitation bearings) as the molecular pump rotor support. Contact has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no need for lubrication. At present, magnetic levitation molecular pumps are widely used in the fields of obtaining high vacuum and high cleanliness vacuum environments.

[0003] The internal structure of the mag...

Claims

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