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Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser

A technology of quartz glass and femtosecond laser, which is applied in the direction of manufacturing tools, laser welding equipment, welding equipment, etc., can solve the problems of poor transparency, complicated production, and large heat generation of silicon-based materials, and achieve strong light transmission ability and biological The effect of good affinity and simple process

Active Publication Date: 2012-06-27
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the generation of micro-electromagnetic force is mainly produced by coils made of micro-electromechanical systems (MEMS) technology. The base materials used are mostly silicon composite materials, which are relatively complicated to manufacture, high in cost, and high in heat generation, especially for micro-spiral inductors with true three-dimensional structures. Devices, MEMS technology has obvious shortcomings, it is difficult to process inductance coils with good performance
The poor transparency of silicon-based materials makes it difficult to carry out the fluorescence detection process in the later stage of micro-analysis

Method used

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  • Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser
  • Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser
  • Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser

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Experimental program
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Effect test

Embodiment 1

[0027] This embodiment includes the following steps.

[0028] Step 1. The femtosecond laser beam passes through the attenuator, polarizer and lens installed on the optical path to focus on the lower surface of the quartz glass. The quartz glass is fixed on the three-dimensional precision workbench, and the movement of the three-dimensional precision workbench is controlled to make the femtosecond laser beam The focus scans the required micro-helical track profile from bottom to top inside the quartz glass.

[0029] The thickness of the quartz glass is L=1200um, the femtosecond laser focusing adopts a 100 times lens, the numerical aperture of the lens is 0.9, and the required micro-helical trajectory profile radius R=60um is scanned, and the scanning speed of the femtosecond laser is equal to 10um / s .

[0030] Step 2. Soak the scanned quartz glass substrate in a hydrofluoric acid solution with a mass concentration of 10%, and place it in an ultrasonic environment at a temperat...

Embodiment 2

[0033] This embodiment includes the following steps:

[0034] Step 1. The femtosecond laser beam passes through the attenuator, polarizer and lens installed on the optical path to focus on the lower surface of the quartz glass. The quartz glass is fixed on the three-dimensional precision workbench, and the movement of the three-dimensional precision workbench is controlled to make the femtosecond laser beam The focus scans the required micro-helix track profile from bottom to top inside the quartz glass;

[0035] Described quartz glass thickness is L=1200um, and femtosecond laser focusing adopts 100 times lens, and the numerical aperture of lens is 0.9, and the femtosecond laser beam power through attenuation plate, polarizer and lens is 3 milliwatts, scans out required The radius of the micro-helical trajectory profile is R=100um, and the scanning speed of the femtosecond laser is equal to 10um / s.

[0036] Step 2. Soak the scanned quartz glass substrate in hydrofluoric acid ...

Embodiment 3

[0039] This embodiment includes the following steps:

[0040] Step 1. The femtosecond laser beam passes through the attenuator, polarizer and lens installed on the optical path to focus on the lower surface of the quartz glass. The quartz glass is fixed on the three-dimensional precision workbench, and the movement of the three-dimensional precision workbench is controlled to make the femtosecond laser beam The focus scans the required micro-helix track profile from bottom to top inside the quartz glass;

[0041]The thickness of the quartz glass is L=1200um, the femtosecond laser focusing adopts a 100 times lens, the numerical aperture of the lens is 0.9, and the required micro-helical trajectory profile radius R=60um is scanned, and the scanning speed of the femtosecond laser is equal to 10um / s .

[0042] Step 2. Soak the scanned quartz glass substrate in a hydrofluoric acid solution with a concentration of 10%, and place it in an ultrasonic environment at a temperature of 6...

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Abstract

The invention discloses a method for forming a three-dimensional micro spiral channel inside quartz glass by using femto-second laser. The method comprises the following steps of: focusing femto-second laser beams onto the lower surface of the quartz glass, fixing the quartz glass on a three-dimensional precision workbench, and scanning a needed micro spiral locus profile from bottom to top inside the quartz glass by using the focal point of the femto-second laser beams; and soaking a scanned quartz glass substrate into a hydrofluoric acid solution, and corroding regions which are treated by femto-second laser till a micro spiral channel which is penetrated up and down is formed. The method disclosed by the invention has the advantages of simple process and low cost.

Description

technical field [0001] The invention relates to the technical field of optical micromachining, in particular to a method for manufacturing a three-dimensional micro-spiral channel inside quartz glass by using a femtosecond laser. Background technique [0002] In the early 1990s, Manz and Widmer first proposed the concept of Micro Total Analysis Systems (μ-TAS) based on microelectronic processing technology in the field of analytical chemistry. Microfluidic chip (Micro fluidic chip) Technology is an important part of the miniature total analysis system. As a special type of active biochip structure, electromagnetic biochip mainly refers to the use of electromagnetic force to control and manipulate magnetically modified molecules or particles, so as to realize the transfer, hybridization and Amplification, detection and other functions. At present, the generation of micro-electromagnetic force is mainly produced by coils made of micro-electromechanical systems (MEMS) technolo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/04B23K26/36C03C15/00B23K26/55
Inventor 杨青李村何圣关柳克银陈烽赵玉龙
Owner XI AN JIAOTONG UNIV
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