Intelligent programmable-control microcurrent measurement display system

Abstract

The invention discloses an intelligent programmable-control microcurrent measurement display system, which is characterized by comprising a computer control module, a display module, a communication module, an A/D (analog/digital) conversion module, a microcurrent measurement system programmable control module, a programmable-control current signal amplifying module and a programmable-control filter module. Microcurrent signals to be measured are input to the programmable-control current signal amplifying module, are amplified and then converted into voltage signals, the voltage signals are input to the programmable-control filter module so as to be filtered, the filtered signals are input to the display module through the A/D conversion module and the communication module so as to be displayed, the programmable-control current signal amplifying module, the programmable-control filter module and the A/D conversion module are controlled by the microcurrent measurement system programmable control module, and the computer control module controls the microcurrent measurement system programmable control module through the communication module. The intelligent programmable microcurrent measurement display system is low in manufacturing cost, higher in adaptability and lowered in price resistance to scientific research.

Description

technical field [0001] The invention belongs to the field of defect detection of semiconductor devices, and in particular relates to a programmable intelligent micro-current measurement and display system. Background technique [0002] Today's electronic circuits are dominated by semiconductor devices. Regardless of a single MOS device or a VLSI, the monitoring of various small current changes has become a way to explore device functions, defects and stability. As far as a single MOS transistor or a special MOS capacitor device is concerned, there will always be unavoidable defects in the design and production process of the device itself. At the same time, some characteristics of the microelectronic material itself may also cause certain performance degradation and parameter drift of the device during operation. For this kind of phenomenon, at present, pulse voltage is generally used to test the charge and discharge of the device, and the performance and reliability of th...

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Problems solved by technology

[0003]1. The instrument itself is expensive, so the universal applicability of the instrument will be greatly reduced, and the high cost will increase the resistance of scientific research

[0004]This type of instrument often has a relatively single function, and also requires a signal generator and a large external oscilloscope to form a measurement system, which increases the difficulty of the experiment and the probability of accidental errors , reducing the reliability of the experimental results

[0005]This type of instrument often sets parameters for manual physical buttons, which is easy to cause equipment loss and reduce test efficiency

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