Tunable polarization wavelength vertical-cavity surface-emitting laser and preparation method thereof
A vertical cavity surface emission and laser technology, which is used in lasers, laser parts, semiconductor lasers, etc., can solve the problems of difficulty in achieving polarization stability, unity, low yield, and difficulty in controlling the delay stress and curvature of mirrors.
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[0043] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0044] refer to figure 1 The schematic diagram of the cross-sectional structure of the polarization wavelength tunable vertical cavity surface emitting laser is shown, which adopts a double-chip integrated structure. Specifically: in the semisymmetric laser, from top to bottom, there are subwavelength grating (6), p-type injection electrode ( 5), P-type ohmic contact layer (12), P-type aluminum gallium arsenide pair layer (Al 0.9 Ga 0.1 As / A l0.12 Ga 0.88 As)(15), aluminum gallium arsenide (Al 0.98 Ga 0.02 As) oxidation current confinement layer (7), active region (Ga 0.83 In 0.17 As / GaAs 0.92 P 0.08 )(8), n-type aluminum gallium arsenide layer (Al 0.9 Ga 0.1 As / Al 0.12 Ga 0.88 As) (9), n-type gallium arsenide substrate (GaAs) (1), substrate ohmic contact electrode layer (11), in the micromechanical film, tuning electrode...
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