Grating distributed feedback quantum cascade laser

A technology of quantum cascade and grating distribution, which is applied in the direction of lasers, phonon exciters, laser components, etc., can solve the problems of coupling coefficient changes and grating shape sensitivity, etc., to increase peak field strength and increase output power , The effect of reducing the coupling coefficient of the buried grating
CN103368071AActive Publication Date: 2013-10-23INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
Publication Date
2013-10-23

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Abstract

The invention provides a grating distributed feedback quantum cascade laser which comprises a substrate, a lower waveguide layer, a lower optical confinement layer, an active area, an upper optical confinement layer, an equivalent phase-shifting grating and an upper waveguide layer, wherein the lower waveguide layer, the lower optical confinement layer, the active area, the upper optical confinement layer, the equivalent phase-shifting grating and the upper waveguide layer sequentially grow on the substrate. The equivalent phase-shifting grating is arranged on the upper surface of the upper optical confinement layer and comprises a uniform grating, a sampling grating and a pi phase-shifting structure. Compared with a traditional process for manufacturing the uniform grating, the process for manufacturing the equivalent phase-shifting grating is much simpler, and preparation difficulty of the grating distributed feedback quantum cascade laser is greatly reduced.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor lasers, in particular to a grating distributed feedback quantum cascade laser. Background technique

[0002] Single-mode high-power quantum cascade lasers with a wavelength of 4-9 μm have broad application prospects in the fields of atmospheric environment monitoring, medical diagnosis, and high-resolution spectroscopy. The most conventional and effective way to achieve single-mode operation of quantum cascade lasers is to form a distributed feedback structure by introducing a grating process. Generally, quantum cascade lasers can be divided into buried gratings and surface gratings according to the location of grating fabrication. Among them, buried gratings have attracted much attention due to their smaller waveguide losses.

[0003] The buried grating is mainly fabricated on the upper optical confinement layer InGaAs in the active area. Since the grating is very close to the active area,...

Claims

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