Elastic element based three freedom degree precision movement support device

Abstract

The invention relates to a three-freedom-degree accurate motion support device based on flexible element, wherein a frame and a support plate are arranged with three independent linear displacement devices A, B and C parallel with the mirror normal line and distributed along the circumference of a support mirror in equal 120 degrees, while the center is arranged with a rotary motion couple and an axial motion guide coupler. The invention is characterized in that the two couples comprise that the frame is fixed with a plurality of support posts uniformly distributed on a concentric circle, which are respectively fixed with the outer edge of a membrane (as flexible membrane or support membrane) with high strength and flexibility, to function eccentric pre-stress on the flexible membrane to expand the membrane, and the center of the flexible membrane is fixed with a support plate. The invention can avoid rolling or sliding connection and realize the displacement without return space, with low cost, but without lubricant, special maintenance or the like.

Description

Technical field [0001] The present invention provides a precision support device with three degrees of freedom of movement, which is especially suitable for support in optical mirror, precision tracking or super-finishing industries that require micro-nano-resolution precision movement on a sub-millimeter stroke. Background technique [0002] In the working process of modern astronomical telescopes, optical mirrors often require precise motions with three degrees of freedom and high resolution on a small stroke of the sub-millimeter order, that is, translation along its normal and rotation around two axes perpendicular to the normal. . According to the principle that a rigid body must realize the motion of determining the number of degrees of freedom, it must have the same principle of independent original motion, and according to the convenience and manufacturability of engineering realization, three independent linear motions are generally selected as the original motion. Refer...

AI Technical Summary

Problems solved by technology

The advantage of this kind of motion support system based on bearing shafting is that it can achieve a large range of motion and displacement, but the disadvantage is that friction, return clearance and even hysteresis are inherent problems that are difficult to overcome, especially for the realization of precise motion and definite displacement. , which is extremely harmful; and the bearing shafting mechanism is more complicated, which requires higher precision in the design space of the mechanism and parts processing, and requires better maintenance and maintenance, such as dust prevention and lubrication

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