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Minitype magnetic field sensor based on nano particle magneto rheological elastomer film

A magnetorheological elastomer, magnetic field sensor technology, applied in the use of electromagnetic devices for magnetic field measurement, magnetic field size/direction and other directions, can solve problems such as consumption deformation or maintaining resonance, accuracy is easily affected by temperature, etc., to reduce power consumption. consumption effect

Inactive Publication Date: 2014-09-10
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sensitive element of the first type of magnetic field sensor is composed of semiconductor devices, so the accuracy is easily affected by temperature
The detection element of the second type of sensor is a mechanical device, which is not sensitive to temperature, but additional energy must be consumed to generate deformation or maintain resonance during measurement

Method used

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  • Minitype magnetic field sensor based on nano particle magneto rheological elastomer film
  • Minitype magnetic field sensor based on nano particle magneto rheological elastomer film
  • Minitype magnetic field sensor based on nano particle magneto rheological elastomer film

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Experimental program
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Embodiment 1

[0017] The manufacturing process of the new nanoparticle magnetorheological elastomer film:

[0018] (1) Preparation of PDMS-iron powder mixture

[0019] Polydimethylsiloxane (Polydimethylsiloxane, PDMS) is a new type of polymer material widely used in the field of micro-electromechanical. The material is a transparent elastomer at room temperature, has biocompatibility, chemical resistance, and good wear resistance. . The PDMS used to make the nanoparticle magnetorheological elastomer film is divided into two parts: silica gel and curing agent (Dow Corning SYLGARD 184). The production steps are as follows:

[0020] 1) Mix the silica gel and the curing agent in a weight ratio of 10:1, stir evenly, put the mixture into an ultrasonic oscillator and vibrate for 2 minutes to remove bubbles, and at the same time promote its further mixing.

[0021] 2) Mix the mixture obtained in step 1) with chloroform at a weight ratio of 1:1, stir well and shake again for 10 minutes to ensure t...

Embodiment 2

[0029] Because the elastic modulus E of the novel nanoparticle magnetorheological elastomer film will change under the condition of a field, the present invention utilizes this characteristic to make it.

[0030] Such as figure 1 Shown is the cross-section of the initial state of the miniature magnetic field sensor of the present invention, and the overall structure of the miniature magnetic field sensor is as follows Figure 5 As shown, it includes a nanoparticle magnetorheological elastomer film 1 , four piezoresistors deposited on the nanoparticle magnetorheological elastomer film 1 , a glass cover 3 , a silicon substrate 4 and a glass substrate 5 . figure 1 Among them, P1 is atmospheric pressure, and P2 is vacuum, and the air pressure difference (the difference between P1 and P2) on both sides of the nanoparticle magnetorheological elastomer film 1 will cause the nanoparticle magnetorheological elastomer film 1 to bend and deform to the side where the air pressure is small...

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Abstract

The invention discloses a minitype magnetic field sensor based on a nano particle magneto rheological elastomer film, which includes a nano particle magneto rheological elastomer film (1), four varistors deposited on the nano particle magneto rheological elastomer film (1), a glass outer cover (3), a silicon substrate (4) and a glass substrate (5). The minitype magnetic field sensor based on the nano particle magneto rheological elastomer film, provided by the invention, overcomes the influence of temperature on the precision of the sensor, and as the sensitive element adopted by the magnetic sensor is a novel nano particle magneto rheological elastomer film, deformation under the action of the magnetic field can occur without consuming extra energy during the testing, as a result, the integral power consumption is reduced further.

Description

technical field [0001] The invention relates to a micro-magnetic field sensor based on a nano-particle magneto-rheological elastomer film used in a micro-electromechanical system (MEMS), and belongs to the field of micro-electromechanical and sensor sciences. Background technique [0002] A magnetic field sensor refers to a device that can convert a magnetic field and its variation into an electrical signal output. Magnetic field sensors are widely used in fields such as industry, military affairs, biology, and medicine. For example, magnetic field sensors are applied to computer hard disk heads to make reading data more accurate and faster; magnetic compasses made of magnetic field sensors help aircraft and ships to locate more accurately; some sophisticated magnetic field sensors, such as superconducting quantum interference devices The magnetometer can measure the heart magnetism, lung magnetism and biological tissue magnetic susceptibility of the human body, which is he...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/06
Inventor 彭倍张遒姝李迪黄洪钟郝晓红周吴
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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