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Graduated-refractive-index antireflection-film solar cell and preparation method thereof

A graded-refractive-index solar cell technology, applied in the field of graded-refractive-index anti-reflection film solar cells and its preparation, can solve problems such as optical mismatch and refractive index interface differences, and achieve stable electrical performance, small attenuation, and good market prospects Effect

Active Publication Date: 2013-04-03
CHINT NEW ENERGY TECH (HAINING) CO LTD
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Problems solved by technology

[0005] In order to solve the optical mismatch problem caused by the huge refractive index interface difference in the double-layer anti-reflection film in the above-mentioned solar cell structure, the present invention proposes a double-layer SiNx:H anti-reflection film on the theoretical basis. Preparation method of solar cell realizing graded anti-reflection film without obvious interface

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  • Graduated-refractive-index antireflection-film solar cell and preparation method thereof

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Embodiment Construction

[0027] The following disclosure provides many different embodiments or examples for implementing different structures of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Furthermore, the present invention may repeat reference numerals and / or letters in different instances. This repetition is for the purpose of simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. It should be noted that the components illustrated in the figures are not necessarily drawn to scale. Descriptions of well-known components and processing techniques and processes are omitted from the present invention to avoid unnecessarily limiting the present invention.

[0028] refer to figure 1 , figure 1 It is a schematic flowchart of a specific embodiment of a method for preparing a graded-index anti-reflection film solar cell ac...

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Abstract

The invention discloses a preparation method of a graduated-refractive-index antireflection-film solar cell. The preparation method includes the steps: forming a textured surface on the front side of a silicon wafer; performing P diffusion on the front side of the silicon wafer, and then removing phosphorosilicate glass and a peripheral P diffusion layer on the front side of the silicon wafer; forming a graduated-refractive-index antireflection film on the front side of the silicon wafer; forming a back electrode and an aluminum back-surface field on the back side of the silicon wafer; and forming a positive electrode on the front side of the silicon wafer. Correspondingly, the invention further provides the graduated-refractive-index antireflection-film solar cell. The solar cell prepared by the method is good in electrical property and small in attenuation.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a graded-refractive-index anti-reflection film solar cell and a preparation method thereof. Background technique [0002] The preparation technology of anti-reflection film is one of the key technologies in the production process of solar cells. The SiNx:H film prepared by PECVD not only has the effect of reducing the surface reflectivity of the silicon wafer, but also the high concentration of hydrogen in the SiNx:H film can provide good protection. Surface passivation and bulk passivation can greatly improve the photoelectric conversion efficiency of solar cells. [0003] The hydrogen content can be controlled by the refractive index of the SiNx:H film: as the refractive index of the silicon nitride film increases, the density of hydrogen adsorbed in the film also tends to increase. However, as the refractive index increases, the extinction coefficient increases, and the o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L31/0216
CPCY02P70/50
Inventor 石强韩玮智牛新伟蒋前哨李永辉仇展炜
Owner CHINT NEW ENERGY TECH (HAINING) CO LTD
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