Unlock instant, AI-driven research and patent intelligence for your innovation.

cutting device

A cutting device and cutting tool technology, which is applied to fine working devices, stone processing equipment, manufacturing tools, etc., can solve problems such as longer time, cumbersome operations, and reduced productivity, and achieve simplified operations, productivity, and shortening of interruptions. effect of time

Active Publication Date: 2016-04-20
DISCO CORP
View PDF15 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the conventional straight dressing, the workpiece held by the chuck table is removed, and the dressing plate is placed and held on the chuck table, that is, replacement is required, and there is a problem that the work becomes cumbersome.
In addition, after straight dressing, the dressing plate held by the chuck table must be removed, and the workpiece must be placed and held on the chuck table again, and the cutting process of the workpiece must be interrupted for straight dressing. The time becomes longer, and there is a problem of lowering productivity

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • cutting device
  • cutting device
  • cutting device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. However, the present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include elements that can be easily assumed by those skilled in the art, and elements that are substantially the same. In addition, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or changes in the structure can be made without departing from the gist of the present invention.

[0034] figure 1 It is a figure which shows the structural example of the cutting apparatus concerning embodiment. figure 2 It is a figure which shows a cutting member and a trimming member. image 3 It is a figure which shows the positional relationship of a cutting member and a trimming member. in addition, image 3 is a view viewing the cutting member a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a cutting device which realizes simplification of flattening finishing work and improvment of productivity. The cutting device (1) comprises a chuck worktable (10), a cutting component (20a, 20b) provided with a cutting blade (21a) assembled on a main shaft (22a), a Y-axis moving member (30a, 30b) moving the main shaft (22a) in a Y-axis direction, a Z-axis moving member (40a, 40b) moving the main shaft (22a) in a Z-axis direction, and a finishing member (50a, 50b). The finishing member is adjacent to the chuck worktable (10) and is disposed on a moving path in which the cutting blade (21a) is driven to move by the Y-axis moving member (30a, 30b); the finishing member (50a, 50b) comprises a finishing plate and a holding member; the holding member holds the finishing plate and can rotate around a center of a central axis; the height (H1) of a grinding surface of the finishing plate held by the holding member is equal to or less than the height (H2) of the chuck worktable (10) surface.

Description

technical field [0001] The present invention relates to a cutting device for cutting a workpiece held by a chuck table. Background technique [0002] For wafers formed with devices such as IC (Integrated Circuit) and LSI (LargeScale Integration, large-scale integration), in order to prevent cracks and dust during the manufacturing process, the outer periphery of the wafer is chamfered. Therefore, when the wafer is ground to be thin, the chamfered portion of the outer periphery is formed into an edge shape (eave shape). When the chamfered portion of the outer periphery is shaped like a cutting edge, there is a possibility that a chip is formed from the outer periphery and the wafer is damaged. Therefore, a technique has been proposed (for example, refer to Patent Document 1) in which the chamfered portion of the outer periphery is cut in advance with a cutting tool in the circumferential direction, and the back surface of the wafer is ground after removing a part of the oute...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B28D5/00
Inventor 凑浩吉香西宏彦北浦毅石塚隆一
Owner DISCO CORP