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Capacitive pressure sensor with a groove for relieving diaphragm stresses

A capacitive sensor and pressure technology, which can be used in the measurement of fluid pressure using capacitance changes, the measurement of fluid pressure through electromagnetic elements, and the measurement of fluid pressure by elastic deformation gauge, which can solve the problems of reducing the thickness of the diaphragm and difficulty.

Active Publication Date: 2013-05-01
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Similarly, reducing the diaphragm thickness to accommodate lower pressures is difficult due to the difficulty of securing the diaphragm relative to the housing without subjecting the diaphragm to flex

Method used

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  • Capacitive pressure sensor with a groove for relieving diaphragm stresses
  • Capacitive pressure sensor with a groove for relieving diaphragm stresses

Examples

Experimental program
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Embodiment Construction

[0011] refer to figure 1 , one embodiment of the capacitive sensor assembly 10 is used to measure pressure relative to a reference pressure. The capacitive sensor assembly 10 includes a housing assembly 12 . The housing assembly 12 includes at least two subassemblies, a measurement subassembly 14 and a reference subassembly 16 . The subassembly 14 comprises a cylindrical section 18 having an opening 20 at one end for receiving a gas whose pressure is to be measured, and a diaphragm 22 at the other end. The space delimited by section 18 , opening 20 and membrane 22 defines a measurement chamber 24 for containing the gas whose pressure is to be measured. The second reference subassembly 16 includes a cylindrical section 26 having an end plate 28 with a first opening 30 for receiving an inlet tube 32, a second opening 34 for receiving an electrode assembly, and a getter (shown in dashed lines). Shown) 40, the electrode device includes a central electrode 36 and a ring electrod...

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PUM

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Abstract

A sensor assembly includes a housing assembly, an electrode arrangement and a diaphragm having a fixed portion secured to the housing assembly and an active portion movable relative to the electrode arrangement in response to a differential pressure applied to opposite sides of the diaphragm. The fixed portion of the diaphragm is secured at one or more locations relative to at least a portion of the housing assembly; and at least one groove is formed in the fixed portion of the diaphragm between the locations at which the diaphragm is fixed relative to the housing assembly and the active portion so as to relieve any stress on the active portion of the diaphragm. A method of making the sensor assembly is also disclosed.

Description

technical field [0001] The present invention relates to capacitive sensors, and more particularly to a low-pressure capacitive manometer including a diaphragm configured to secure the diaphragm within a gauge housing to eliminate deflection during welding and to allow for spacing of the diaphragm sheet so that it is not affected by the stresses caused by welding. Background technique [0002] Capacitive sensors generally consist of a housing that includes two chambers, a first chamber for containing the gas or vapor whose pressure is to be measured, and a second chamber Used to contain gas at reference pressure. The reference pressure is usually determined from a reference source or ambient gas reflecting ambient conditions. The two chambers are separated by a flexible membrane positioned therebetween. The diaphragm is fixed around its periphery such that the diaphragm seals one chamber from the other and has a movable part that flexes in response to the pressure differen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L7/08G01L9/00
CPCG01L9/0072G01L7/082G01L9/0048G01L9/12G01L7/08G01L19/00
Inventor C·格鲁津
Owner MKS INSTR INC