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Die Bonding Device

A chip bonding and feeding technology, applied in the field of bonding die devices

Active Publication Date: 2015-12-09
苏州均华精密机械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to provide a chip bonding device, which utilizes a rotary module, so that at least two pick-and-place modules can perform the steps of die bonding in sequence, and will not cause any obstacles in the process of die bonding, so as to overcome The problem of poor production capacity, and can maintain the smoothness of die bonding operation

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Embodiment 1: A chip bonding device

[0022] see Figure 1 and Figure II As shown, the chip bonding device has a supply module 10, at least one turning module 11, a rotating module 12, at least two pick-and-place modules 13, a gluing module 14, a feeding module 15, at least one first visual positioning The module 16 and a second visual positioning module 17 .

[0023] Such as Figure 1 and Figure II As shown, a supply module 10 is provided with a plurality of dies 18 .

[0024] The overturning module 11 is disposed above the supply module 10 , and the overturning module 11 has functions of suction and rotation.

[0025] The feeding module 15 is disposed on one side of the supply module 10 .

[0026] The rotating module 12 is arranged between the supply module 10 and the feeding module 15 .

[0027] At least two pick-and-place modules 13 are disposed on the rotating module 12 .

[0028] At least one gluing module 14 is disposed below the rotating module 12 .

...

Embodiment 2

[0031] Embodiment 2: A chip bonding device

[0032] Please cooperate with reference Figure three As shown, in this embodiment, only the turnover module 11, the first visual positioning module (not shown in the figure), the rotation module 12, the pick-and-place module 13, the glue module 14 and the feeding module 15 are increased in number, and the rest of the components are all It is the same as the first embodiment, so the component symbols are used in the first embodiment, which is hereby described.

[0033] Such as Figure three As shown, two feeding modules 15 are respectively arranged on two sides of the supply module 10 .

[0034] Each first vision module 16 is disposed above the feeding module 15 .

[0035] Two turning modules 11 are disposed on the supply module 10 , and each turning module 11 corresponds to each rotating module 12 .

[0036] The two rotating modules 12 are respectively arranged between one of the feeding modules 15 and the supply module 10 .

...

Embodiment 3

[0039] Embodiment 3: A chip bonding device

[0040] Please cooperate with reference Figure four and Figure five As shown, in this embodiment, only the number of pick-and-place modules 13 is increased, and the rest of the components are the same as those in Embodiment 2, so the symbol of the components follows Embodiment 1, which is hereby described.

[0041] Four pick-and-place modules 13 are arranged on each rotating module 12 , and any two adjacent pick-and-place modules 13 have a certain distance.

[0042] Please refer to Figure II As shown, the second vision positioning module 17 locates the die 18 located on the supply module 10, and after the turning module 11 receives the information from the second vision positioning module 17, the turning module 11 absorbs the selected die 18 located on the supply module 10 , and flip the sucked crystal grains, for example, the flip angle can be between 90 and 270 degrees, the pick-and-place module 13 sucks the crystal grains 18...

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PUM

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Abstract

Provided is a chip seaming device. The chip seaming device is provided with a supply module and a feeding module. A rotation module is arranged between the supply module and the feeding module. The rotation module is provided with at least two taking-and-putting modules, a first visual location module is arranged above the feeding module. The at least two taking-and-putting modules suffer from a linkage of the rotation module, therefore, when one of the two taking-and-putting modules carries out motion of glue moistening or sticky setting, the other taking-and-putting module is capable of carrying out motion of absorbing or glue moistening so that die bond operation can have a smooth degree so as to guarantee the optimum die bond accuracy and improve the productivity of the die bonding operation.

Description

technical field [0001] The invention relates to a chip bonding device, in particular to a device for bonding crystal grains. Background technique [0002] In recent years, the development of semiconductor manufacturing process has become increasingly mature, but the most critical and important step in the semiconductor manufacturing process is flip chip. [0003] The current flip-chip process is as follows: cut a wafer (Wafer) to form multiple dies (Die), then flip these dies, and go through a step of bonding dies (DieBond) to make the dies adhere to a substrate. [0004] In the step of die bonding, the pick-up module of a die-bonding machine picks up the die on a die tray (DieTray) or the cut wafer, and the vision module first captures and positions the die, and then moves the die To a sticky module, so that the die is attached to the adhesive, and then the die with the adhesive is moved to a substrate, and the die is put down, so that the die is adhered to the substrate,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/58H01L21/67
Inventor 石敦智
Owner 苏州均华精密机械有限公司