Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement

Abstract

The invention discloses an air flotation vibration isolation platform based on a spring zero position criterion and laser self-alignment measurement, and belongs to ultra precise measurement and ultra precision machining equipment. According to the air flotation vibration isolation platform, three or more than three vibration isolators in static pressure air flotation structure are adopted to support an air flotation vibration isolation platform body and a load of the platform body, a beam splitter prism and a photoelectric detector are adopted to achieve platform six-freedom-degree posture monitoring, and an actuator is displaced vertically and horizontally between each vibration isolator and the platform body to achieve six-freedom-degree posture adjustment of the platform body. A zero position criterion device supported by the spring vibration isolators effectively isolates the influences from ground vibration on the detection of a reference beam, and improves the stability of the zero position criterion of a laser beam. The photoelectric detector is adopted to detect the flat flotation and angle flotation of the reference beam, the pair of wedge angle prisms capable of adjusting the space and angle of opposite positions are used for adjusting the flat flotation and angle flotation of the reference beam in real time, the reference beam is calibrated, and the vibration isolation performance of the platform can be obviously improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-floating vibration-isolation platform based on spring zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. The application of high-quality horizontal attitude air bearing vibration isolation platform is very extensive. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of machinery and equipment and the performance of instruments and instruments, and will directly affect the air flotation vibrat...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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