Magnetic levitation vibration isolation platform based on air spring aero position standard and auto-collimation measurement

Abstract

Disclosed is a magnetic levitation vibration isolation platform based on air spring aero position standard and auto-collimation measurement. The magnetic levitation vibration isolation platform belongs to ultra precise measurement and ultra precision machining equipment. Three or more vibration isolators with static pressure magnetic levitation structures are adopted to support the magnetic levitation vibration isolation platform body and loads of the magnetic levitation vibration isolation platform. Monitoring of the platform is achieved, an actuator is vertically and horizontally moved between the vibration isolators and the platform to achieve adjustment of the platform in a six-degree-of-freedom posture mode. A zero standard device supported by an air-spring-type absorber effectively isolates the influence of vibration of the ground to detection of reference beams and improves stability of a laser beam zero standard. Flat floating and angular floating of the reference beams are detected by the photoelectric detector and are timely adjusted by using a pair of wedge angle prisms with adjustable relative position gaps and angles, and therefore calibration of the reference beams is realized and vibration isolation performance of the platform can be obviously improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to a magnetic suspension vibration isolation platform based on air spring zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. High-quality horizontal attitude maglev vibration isolation platform is widely used. In factories related to biological science, electronic optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of the machine equipment and the performance of the instruments, and will directly affect the maglev vibration isolation platform Vibration su...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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