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34results about How to "The impact of effective quarantine testing" patented technology

Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement

The invention discloses an air floatation vibration isolation platform on the basis of air floatation zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The air floatation vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. An air floatation vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure air floatation structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by air floatation dampers in the air floatation vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement

The invention discloses an air flotation vibration isolation platform based on a spring zero position criterion and laser self-alignment measurement, and belongs to ultra precise measurement and ultra precision machining equipment. According to the air flotation vibration isolation platform, three or more than three vibration isolators in static pressure air flotation structure are adopted to support an air flotation vibration isolation platform body and a load of the platform body, a beam splitter prism and a photoelectric detector are adopted to achieve platform six-freedom-degree posture monitoring, and an actuator is displaced vertically and horizontally between each vibration isolator and the platform body to achieve six-freedom-degree posture adjustment of the platform body. A zero position criterion device supported by the spring vibration isolators effectively isolates the influences from ground vibration on the detection of a reference beam, and improves the stability of the zero position criterion of a laser beam. The photoelectric detector is adopted to detect the flat flotation and angle flotation of the reference beam, the pair of wedge angle prisms capable of adjusting the space and angle of opposite positions are used for adjusting the flat flotation and angle flotation of the reference beam in real time, the reference beam is calibrated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement

The invention discloses a magnetic suspension vibration isolation platform on the basis of zero-position reference of springs and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The magnetic suspension vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. A magnetic suspension vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure magnetic suspension structures, and six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and are adjusted by perpendicular and horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by spring type dampers in the magnetic suspension vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement

The invention discloses a gas magnetic vibration isolation platform based on an air floatation zero position benchmark and laser auto-collimation measurement, and belongs to an ultra precise measurement and ultraprecision machining device. Three or more vibration isolators with static pressure gas magnetic structures are adopted to support a gas magnetic vibration isolation platform body and a load of the gas magnetic vibration isolation platform body. Platform six degrees of freedom gesture measurement are achieved by adopting a beam splitter prism and a photoelectric detector. The adjustments of the platform six degrees of freedom gesture by a manner that a vertical direction displacement actuator and a horizontal direction displacement actuator are arranged between the vibration isolator and the platform body are achieved. The effect of the vibration of the ground on reference beam measurement can be effectively isolated through a zero position benchmark device supported by an air floating type vibration absorber, and stability of the laser beam zero benchmark is improved. A photoelectricity detector is adopted to measure flat floating and angle drift of the reference beam, a wedge angle prism capable of adjusting relative position gaps and angles is adopted to adjust the flat floating and the angle drift of the reference beam, the reference beam correction is achieved, and vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement

A spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure spring structure to support a spring vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a horizontal displacement executer between the vibration isolators and the platform body to achieve three degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by a spring absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The spring vibration isolation platform adopts the photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform.
Owner:HARBIN INST OF TECH

Air spring vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement

The invention discloses an air spring vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static air spring structures are adopted to support an air spring vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically and horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a gas magnetic vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.

Spring vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement

The invention discloses a spring vibration isolation platform on the basis of air floatation zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The spring vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. A spring vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure spring structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by perpendicular displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by air floatation dampers in the spring vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors, and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement

An air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure air spring structure to support an air spring vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a horizontal displacement executer between the vibration isolators and the platform body to achieve three degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by a floatation absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The air spring vibration isolation platform adopts a photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform.
Owner:HARBIN INST OF TECH

Air spring vibration isolation platform based on maglev zero reference and laser self-collimating measurement

The invention discloses an air spring vibration isolation platform based on maglev zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static air spring structures are adopted to support an air spring vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a maglev vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Air spring vibration isolation platform based on maglev zero reference and laser self-collimating measurement

The invention discloses an air spring vibration isolation platform based on maglev zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static air spring structures are adopted to support an air spring vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a maglev vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement

The invention discloses a gas magnetic vibration isolation platform based on a spring zero position benchmark and laser auto-collimation measurement and belongs to ultra-precision measurement and ultra-precision machining equipment. The gas magnetic vibration isolation platform based on the spring zero position benchmark and the laser auto-collimation measurement adopts three or more vibration isolators with static pressure gas magnetic structures to support gas magnetic vibration isolation platform bodies and the load of the vibration isolators. Platform six degrees of freedom posture monitoring is realized through a beam splitter prism and a photoelectric detector. A vertical and horizontal displacement actuator is arranged between the vibration isolators and the platform body to achieve the adjustment of the six degrees of freedom of the platform body. A zero position benchmark device supported by a spring damper can effectively isolate the influence of ground vibration on a reference light beam testing. Stability of the laser beam zero position benchmark is improved. Flat drift and angle drift of a reference light beam are tested by the photoelectric detector, and a pair of wedge prisms with adjustable relative position intervals and angles is used for adjusting the flat drift and the angle drift of the reference light beam to achieve reference beam calibration. Therefore, platform vibration isolation performance is significantly improved.
Owner:HARBIN INST OF TECH

Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement

The invention discloses a gas magnetic vibration isolation platform based on a spring zero position benchmark and laser auto-collimation measurement and belongs to ultra-precision measurement and ultra-precision machining equipment. The gas magnetic vibration isolation platform based on the spring zero position benchmark and the laser auto-collimation measurement adopts three or more vibration isolators with static pressure gas magnetic structures to support gas magnetic vibration isolation platform bodies and the load of the vibration isolators. Platform six degrees of freedom posture monitoring is realized through a beam splitter prism and a photoelectric detector. A vertical and horizontal displacement actuator is arranged between the vibration isolators and the platform body to achieve the adjustment of the six degrees of freedom of the platform body. A zero position benchmark device supported by a spring damper can effectively isolate the influence of ground vibration on a reference light beam testing. Stability of the laser beam zero position benchmark is improved. Flat drift and angle drift of a reference light beam are tested by the photoelectric detector, and a pair of wedge prisms with adjustable relative position intervals and angles is used for adjusting the flat drift and the angle drift of the reference light beam to achieve reference beam calibration. Therefore, platform vibration isolation performance is significantly improved.
Owner:HARBIN INST OF TECH

Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement

The invention discloses an air flotation vibration isolation platform based on a spring zero position criterion and laser self-alignment measurement, and belongs to ultra precise measurement and ultra precision machining equipment. According to the air flotation vibration isolation platform, three or more than three vibration isolators in static pressure air flotation structure are adopted to support an air flotation vibration isolation platform body and a load of the platform body, a beam splitter prism and a photoelectric detector are adopted to achieve platform six-freedom-degree posture monitoring, and an actuator is displaced vertically and horizontally between each vibration isolator and the platform body to achieve six-freedom-degree posture adjustment of the platform body. A zero position criterion device supported by the spring vibration isolators effectively isolates the influences from ground vibration on the detection of a reference beam, and improves the stability of the zero position criterion of a laser beam. The photoelectric detector is adopted to detect the flat flotation and angle flotation of the reference beam, the pair of wedge angle prisms capable of adjusting the space and angle of opposite positions are used for adjusting the flat flotation and angle flotation of the reference beam in real time, the reference beam is calibrated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement

The invention discloses a maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static maglev structures are adopted to support a maglev vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a gas magnetic vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Air floating vibration isolation platform based on magnetic levitation zero position standard and laser auto-collimation measurements

The invention discloses an air floating vibration isolation platform based on the magnetic levitation zero position standard and laser auto-collimation measurements and belongs to the tools of ultra precise measurements and ultra precise machining. A vibration isolator air floating isolation platform body with three or more than three static pressure air floating structures and a load thereof are adopted. A beam splitter prism and a photoelectric detector are adopted to achieve monitoring the six degrees of freedom gesture of the platform, and an actuator is displaced vertically between the vibration isolator and the platform body so as to achieve regulating the three degrees of freedom gesture of the platform. In the device, detecting effects of the vibrations of the ground to reference beams can be effectively isolated through zero position standard devices supported by a magnetic levitation type absorber, and the stability of the laser beam zero position standard is improved. The photoelectric detector is adopted to detect the flat float and the corner float of the reference beams, and a pair of wedge angle prisms is used for regulating the flat float and the corner float of the reference beams, wherein the wedge angle prisms are capable of regulating relative location spaces and angles. The correction of the reference beams can be achieved, and the vibration isolation performance of the platform can be improved remarkably.
Owner:HARBIN INST OF TECH

Spring vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement

The invention discloses a spring vibration isolation platform on the basis of air floatation zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The spring vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. A spring vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure spring structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by perpendicular displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by air floatation dampers in the spring vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors, and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Gas floating vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement

The invention discloses a gas floating vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static gas floating structures are adopted to support a gas floating vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically and horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a gas magnetic vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement

The invention discloses a magnetic suspension vibration isolation platform on the basis of zero-position reference of springs and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The magnetic suspension vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. A magnetic suspension vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure magnetic suspension structures, and six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and are adjusted by perpendicular and horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by spring type dampers in the magnetic suspension vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement

The invention discloses a gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static gas floating structures are adopted to support a gas floating vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by an air spring-type vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement

The invention discloses a gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static gas floating structures are adopted to support a gas floating vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by an air spring-type vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Air magnetic vibration isolation platform based on air magnetic zero position reference and laser auto-collimation measurement

An air magnetic vibration isolation platform based on air magnetic zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure air spring structure to support an air magnetic vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a horizontal displacement executer between the vibration isolators and the platform body to achieve three degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by an air magnetic absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The air magnetic vibration isolation platform adopts a photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform.
Owner:HARBIN INST OF TECH

Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement

The invention discloses an air floatation vibration isolation platform on the basis of air floatation zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The air floatation vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. An air floatation vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure air floatation structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by air floatation dampers in the air floatation vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Air spring vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement

The invention discloses an air spring vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static air spring structures are adopted to support an air spring vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically and horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a gas magnetic vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement

An air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure air spring structure to support an air spring vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a horizontal displacement executer between the vibration isolators and the platform body to achieve three degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by a floatation absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The air spring vibration isolation platform adopts a photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform.
Owner:HARBIN INST OF TECH

Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement

The invention discloses a gas magnetic vibration isolation platform based on an air floatation zero position benchmark and laser auto-collimation measurement, and belongs to an ultra precise measurement and ultraprecision machining device. Three or more vibration isolators with static pressure gas magnetic structures are adopted to support a gas magnetic vibration isolation platform body and a load of the gas magnetic vibration isolation platform body. Platform six degrees of freedom gesture measurement are achieved by adopting a beam splitter prism and a photoelectric detector. The adjustments of the platform six degrees of freedom gesture by a manner that a vertical direction displacement actuator and a horizontal direction displacement actuator are arranged between the vibration isolator and the platform body are achieved. The effect of the vibration of the ground on reference beam measurement can be effectively isolated through a zero position benchmark device supported by an air floating type vibration absorber, and stability of the laser beam zero benchmark is improved. A photoelectricity detector is adopted to measure flat floating and angle drift of the reference beam, a wedge angle prism capable of adjusting relative position gaps and angles is adopted to adjust the flat floating and the angle drift of the reference beam, the reference beam correction is achieved, and vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement

The invention discloses a maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static maglev structures are adopted to support a maglev vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body vertically, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by a gas magnetic vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.
Owner:HARBIN INST OF TECH

Magnetic levitation vibration isolation platform based on air spring aero position standard and auto-collimation measurement

Disclosed is a magnetic levitation vibration isolation platform based on air spring aero position standard and auto-collimation measurement. The magnetic levitation vibration isolation platform belongs to ultra precise measurement and ultra precision machining equipment. Three or more vibration isolators with static pressure magnetic levitation structures are adopted to support the magnetic levitation vibration isolation platform body and loads of the magnetic levitation vibration isolation platform. Monitoring of the platform is achieved, an actuator is vertically and horizontally moved between the vibration isolators and the platform to achieve adjustment of the platform in a six-degree-of-freedom posture mode. A zero standard device supported by an air-spring-type absorber effectively isolates the influence of vibration of the ground to detection of reference beams and improves stability of a laser beam zero standard. Flat floating and angular floating of the reference beams are detected by the photoelectric detector and are timely adjusted by using a pair of wedge angle prisms with adjustable relative position gaps and angles, and therefore calibration of the reference beams is realized and vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH

Magnetic levitation vibration isolation platform based on magnetic levitation zero position reference and laser auto-collimation measurement

A magnetic levitation vibration isolation platform based on magnetic levitation zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure magnetic levitation structure to support a magnetic levitation vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a vertical and horizontal displacement executer between the vibration isolators and the platform body to achieve six degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by a magnetic levitation absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The magnetic levitation vibration isolation platform adopts a photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform.
Owner:HARBIN INST OF TECH

Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement

The invention discloses a gas magnetic vibration isolation platform based on a spring zero position benchmark and laser auto-collimation measurement and belongs to ultra-precision measurement and ultra-precision machining equipment. The gas magnetic vibration isolation platform based on the spring zero position benchmark and the laser auto-collimation measurement adopts three or more vibration isolators with static pressure gas magnetic structures to support gas magnetic vibration isolation platform bodies and the load of the vibration isolators. Platform six degrees of freedom posture monitoring is realized through a beam splitter prism and a photoelectric detector. A vertical and horizontal displacement actuator is arranged between the vibration isolators and the platform body to achieve the adjustment of the six degrees of freedom of the platform body. A zero position benchmark device supported by a spring damper can effectively isolate the influence of ground vibration on a reference light beam testing. Stability of the laser beam zero position benchmark is improved. Flat drift and angle drift of a reference light beam are tested by the photoelectric detector, and a pair of wedge prisms with adjustable relative position intervals and angles is used for adjusting the flat drift and the angle drift of the reference light beam to achieve reference beam calibration. Therefore, platform vibration isolation performance is significantly improved.
Owner:HARBIN INST OF TECH

Gas-magnetic vibration isolation platform on basis of magnetic suspension zero-position reference and laser auto-collimation measurement

The invention discloses a gas-magnetic vibration isolation platform on the basis of magnetic suspension zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The gas-magnetic vibration isolation platform is provided with three or more isolation vibrators, beam splitter prisms and photoelectric detectors. A gas-magnetic vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure gas-magnetic structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by magnetic suspension type dampers in the gas-magnetic vibration isolation platform, and the zero-positioning laser beam reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors, and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Owner:HARBIN INST OF TECH
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