The invention discloses a
maglev vibration isolation platform based on gas magnetic zero reference and
laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision
processing equipment; according to the device, three or more vibration isolators of static
maglev structures are adopted to support a
maglev vibration isolation platform body and a load thereof; the posture of the platform with
six degrees of freedom is monitored by a dispersion
prism and a photoelectric
detector, and an
actuator is displaced between the vibration
isolator and the platform body vertically, so that the posture of the platform body with
three degrees of freedom is adjusted; in the device, a zero
reference device which is supported by a gas magnetic vibration absorber effectively isolates the
impact of ground vibration on the detection of a reference
light beam, so that the stability in the zero reference of the
laser beam is improved; the photoelectric
detector is used for detecting the displacement drift and the angle drift of the reference
light beam, the displacement drift and the angle drift of the reference
light beam are adjusted by a pair of
wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the
vibration isolation performance of the platform can be significantly improved.