This invention discloses an apparatus and method for ultra-high vacuum calibration using the
reflux method, belonging to the technical field of vacuum calibration devices. It includes a gas source, a
ball valve, a pressure stabilizing chamber, a gas micro-flowmeter, a
bellows stop valve, calibration chamber one, calibration chamber two, a dry pump, a stop valve, a
solenoid valve, a pumping unit, a flow-limiting element two, a full-range vacuum gauge, an ultra-high vacuum
ionization vacuum gauge, and the vacuum gauge under test. The gas source is connected to the pressure stabilizing chamber via the
ball valve. The pressure stabilizing chamber is connected to calibration chamber one via the gas micro-flowmeter and the
bellows stop valve. Calibration chamber one is connected to calibration chamber two. The dry pump is connected to the pressure stabilizing chamber via the stop valve. The dry pump is connected to the pumping unit via the
solenoid valve. The pumping unit is connected to calibration chamber one via the flow-limiting element two. The full-range vacuum gauge is connected to calibration chamber one. One end of calibration chamber two is connected to the ultra-high vacuum
ionization vacuum gauge, and the other end of calibration chamber two is connected to the vacuum gauge under test. This invention has a simple structure and high calibration accuracy.