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TDLAS (tunable diode laser absorption spectroscopy) temperature calibration system

A technology for calibrating systems and thermometers, applied in thermometer testing/calibration, thermometers, measuring devices, etc., can solve problems such as material desorption on the surface of temperature sensors

Active Publication Date: 2013-06-26
BEIJING DONGFANG MEASUREMENT & TEST INST
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Problems solved by technology

[0002] The vacuum environment will not only cause the surface material of the temperature sensor to desorb, but also its heat transfer mechanism is different from normal pressure. For example, in a vacuum environment, there is a "temperature mutation phenomenon" between the solid surface and the gas layer. There are many uncertainties in the sensor measuring the gas temperature in a vacuum environment

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  • TDLAS (tunable diode laser absorption spectroscopy) temperature calibration system
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  • TDLAS (tunable diode laser absorption spectroscopy) temperature calibration system

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Embodiment Construction

[0020] Below with the accompanying drawings ( Figure 1-Figure 3 ) to illustrate the present invention.

[0021] figure 1 It is a structural schematic diagram of the TDLAS temperature measurement system implementing the present invention. figure 2 It is another structural schematic diagram of the TDLAS temperature measurement system implementing the present invention. Such as figure 1 and figure 2 As shown, the TDLAS temperature calibration system includes a standard sensor temperature measurement system 400 and a calibrated TDLAS temperature measurement system for measuring gas temperature in a vacuum environment. The optical system 300 in the TDLAS temperature measurement system is located in the constant temperature tank 15, so There is a constant temperature liquid between the housing of the optical system 300 and the surrounding wall of the constant temperature tank 15 (it reaches the liquid level 11 of the constant temperature tank), and the standard sensor in the ...

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Abstract

A TDLAS (tunable diode laser absorption spectroscopy) temperature calibration system is used for calibrating in TDLAS temperature measurement and is characterized by comprising a standard sensor temperature measurement system and a calibrated TDLAS temperature measurement system for gas temperature measurement in vacuum environment. An optical system in the TDLAS temperature measurement system is located in a thermostatic bath. Thermostatic liquid is reserved between a shell of the optical system and the peripheral wall of the thermostatic bath. A standard sensor in the standard sensor temperature measurement system is located in the thermostatic liquid.

Description

technical field [0001] The invention relates to a gas temperature measurement and calibration technology in a vacuum environment, in particular to a TDLAS temperature calibration system. The TDLAS (Tunable Diode Laser Absorption Spectroscopy) refers to tunable diode laser absorption spectroscopy technology. Background technique [0002] The vacuum environment will not only cause the surface material of the temperature sensor to desorb, but also its heat transfer mechanism is different from normal pressure. For example, in a vacuum environment, there is a "temperature mutation phenomenon" between the solid surface and the gas layer. There are many uncertainties in the sensor measurement of gas temperature in a vacuum environment. The inventor of the present invention believes that using a thermocouple temperature sensor to calibrate TDLAS for gas temperature measurement in a vacuum environment can effectively improve the certainty of gas temperature measurement in a vacuum en...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K15/00
Inventor 贾军伟张书锋金光远柴昊杨力刘展张明志
Owner BEIJING DONGFANG MEASUREMENT & TEST INST
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