Calibration device for discrete optical axis multispectral alignment instrument
The technology of a calibration device and a calibration instrument, which is applied in the field of optical metrology, can solve the problems of a multispectral calibration instrument that cannot calibrate discrete optical axes, and that the calibration instrument does not have a self-calibration function, and achieves objective calibration results and simple calibration methods Effect
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[0011] The present invention will be further described in detail below in conjunction with the accompanying drawings and preferred embodiments.
[0012] see figure 1 , The calibration device of the first preferred embodiment of the present invention includes a collimator 5, a half mirror 3, a laser 4, a plane mirror 6, a display 7, a CCD camera 8, a tripod 9 and a system support frame 10. The collimator 5 includes a light source 1, a target 2 and an objective lens. The light source 1 is a tungsten halogen lamp; the objective lens is a double glue objective lens. The target 2 is made of zinc sulfide material capable of transmitting visible and infrared light. Draw. The collimator 5 is fixed on the system support frame 10 , and the system support frame 10 is installed on the tripod 9 . The caliber of the collimator 5 should be able to simultaneously accommodate the infrared and visible light channels of the measured alignment instrument. Both the half mirror 3 and the CCD cam...
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