Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement

Abstract

The invention discloses an air floatation vibration isolation platform on the basis of air floatation zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The air floatation vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. An air floatation vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure air floatation structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by air floatation dampers in the air floatation vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-floating vibration isolation platform based on air-floating zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. The application of high-quality horizontal attitude air bearing vibration isolation platform is very extensive. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of machinery and equipment and the performance of instruments and instruments, and will directly affect the air flotation ...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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