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Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement

A technology of zero reference and vibration isolation platform, which is applied in the direction of spring/shock absorber, machine/bracket, vibration suppression adjustment, etc. It can solve the problem of no absolute zero reference, slow system response speed, and inability to obtain high vibration isolation platform. Horizontal vibration isolation performance and other issues to achieve the effect of improving vibration isolation performance and stability

Active Publication Date: 2013-05-01
HARBIN INST OF TECH
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  • Abstract
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  • Claims
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Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned
The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow
[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;
[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance
Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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  • Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement
  • Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement
  • Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement

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Embodiment Construction

[0029] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

[0030] An air-floating vibration-isolation platform based on air spring zero reference and laser self-collimation measurement, the air-floating vibration-isolation platform body 6 is arranged on three or more evenly distributed vibration isolators 4, and the vibration isolators 4 is arranged on the base 5, and the vibration isolator 4 is composed of a vibration isolator base 4a, a vibration isolator bracket 4b and a vibration isolator table 4c, and the vibration isolator table 4c is installed on the vibration isolator base 4a Inside, the vibration isolator support 4b is arranged on the outer side of the vibration isolator base 4a, and the horizontal displacement actuator 8 is arranged between each vibration isolator 4 and the air-floating vibration isolation platform body 6, and the horizontal displacement actuator 8 adopts a horizontally placed rotary v...

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Abstract

The invention discloses a gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static gas floating structures are adopted to support a gas floating vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by an air spring-type vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-floating vibration-isolation platform based on air spring zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. The application of high-quality horizontal attitude air bearing vibration isolation platform is very extensive. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of machinery and equipment and the performance of instruments and instruments, and will directly affect the air flotation vi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16M11/04F16M11/18F16F15/023F16F15/02
Inventor 赵勃谭久彬王雷
Owner HARBIN INST OF TECH
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