Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement
A technology of zero reference and vibration isolation platform, which is applied in the direction of spring/shock absorber, machine/bracket, vibration suppression adjustment, etc. It can solve the problem of no absolute zero reference, slow system response speed, and inability to obtain high vibration isolation platform. Horizontal vibration isolation performance and other issues to achieve the effect of improving vibration isolation performance and stability
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[0029] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
[0030] An air-floating vibration-isolation platform based on air spring zero reference and laser self-collimation measurement, the air-floating vibration-isolation platform body 6 is arranged on three or more evenly distributed vibration isolators 4, and the vibration isolators 4 is arranged on the base 5, and the vibration isolator 4 is composed of a vibration isolator base 4a, a vibration isolator bracket 4b and a vibration isolator table 4c, and the vibration isolator table 4c is installed on the vibration isolator base 4a Inside, the vibration isolator support 4b is arranged on the outer side of the vibration isolator base 4a, and the horizontal displacement actuator 8 is arranged between each vibration isolator 4 and the air-floating vibration isolation platform body 6, and the horizontal displacement actuator 8 adopts a horizontally placed rotary v...
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