Spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement
A zero reference, spring vibration isolation technology, applied in measuring devices, optics, optical components, etc., can solve the problems of no absolute zero reference, slow system response, difficult high-precision measurement, etc., to improve stability. , Improve the effect of vibration isolation performance
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[0029] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
[0030] Spring vibration isolation platform based on spring zero reference and laser self-collimation measurement, the spring vibration isolation platform body 6 is arranged on 3 or more evenly distributed vibration isolators 4, and the vibration isolators 4 are arranged on On the base 5, the vibration isolator 4 is composed of a vibration isolator base 4a, a vibration isolator support 4b and a vibration isolator workbench 4c, and the vibration isolator workbench 4c is installed in the vibration isolator base 4a. The vibrator support 4b is arranged on the outer side of the vibration isolator base 4a, and a horizontal displacement actuator 8 is arranged between each vibration isolator 4 and the spring vibration isolation platform body 6, and the horizontal displacement actuator 8 is placed horizontally The linear voice coil motor, the linear voice coil mot...
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