Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement

Abstract

The invention discloses a gas magnetic vibration isolation platform based on a spring zero position benchmark and laser auto-collimation measurement and belongs to ultra-precision measurement and ultra-precision machining equipment. The gas magnetic vibration isolation platform based on the spring zero position benchmark and the laser auto-collimation measurement adopts three or more vibration isolators with static pressure gas magnetic structures to support gas magnetic vibration isolation platform bodies and the load of the vibration isolators. Platform six degrees of freedom posture monitoring is realized through a beam splitter prism and a photoelectric detector. A vertical and horizontal displacement actuator is arranged between the vibration isolators and the platform body to achieve the adjustment of the six degrees of freedom of the platform body. A zero position benchmark device supported by a spring damper can effectively isolate the influence of ground vibration on a reference light beam testing. Stability of the laser beam zero position benchmark is improved. Flat drift and angle drift of a reference light beam are tested by the photoelectric detector, and a pair of wedge prisms with adjustable relative position intervals and angles is used for adjusting the flat drift and the angle drift of the reference light beam to achieve reference beam calibration. Therefore, platform vibration isolation performance is significantly improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to a gas magnetic vibration isolation platform based on spring zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. High-quality horizontal attitude aeromagnetic vibration isolation platform is widely used. In factories related to biological science, electronic optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of the machine equipment and the performance of the instruments, and will directly affect the aeromagnetic vibration isolation The damping performa...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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