Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement

Abstract

The invention discloses a gas magnetic vibration isolation platform based on an air floatation zero position benchmark and laser auto-collimation measurement, and belongs to an ultra precise measurement and ultraprecision machining device. Three or more vibration isolators with static pressure gas magnetic structures are adopted to support a gas magnetic vibration isolation platform body and a load of the gas magnetic vibration isolation platform body. Platform six degrees of freedom gesture measurement are achieved by adopting a beam splitter prism and a photoelectric detector. The adjustments of the platform six degrees of freedom gesture by a manner that a vertical direction displacement actuator and a horizontal direction displacement actuator are arranged between the vibration isolator and the platform body are achieved. The effect of the vibration of the ground on reference beam measurement can be effectively isolated through a zero position benchmark device supported by an air floating type vibration absorber, and stability of the laser beam zero benchmark is improved. A photoelectricity detector is adopted to measure flat floating and angle drift of the reference beam, a wedge angle prism capable of adjusting relative position gaps and angles is adopted to adjust the flat floating and the angle drift of the reference beam, the reference beam correction is achieved, and vibration isolation performance of the platform can be obviously improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-magnetic vibration isolation platform based on air-floating zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. High-quality horizontal attitude aeromagnetic vibration isolation platform is widely used. In factories related to biological science, electronic optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of the machine equipment and the performance of the instruments, and will directly affect the aeromagnetic vibration isolation The damping p...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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