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Air floating vibration isolation platform based on magnetic levitation zero position standard and laser auto-collimation measurements

A technology of zero reference and vibration isolation platform, which is applied in the direction of measuring devices, optical devices, and feedback control. It can solve the problems of no absolute zero reference, slow system response speed, and difficulty in high-precision measurement. To achieve the effect of improving stability and improving vibration isolation performance

Inactive Publication Date: 2015-03-25
HARBIN INST OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned
The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow
[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;
[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance
Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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  • Air floating vibration isolation platform based on magnetic levitation zero position standard and laser auto-collimation measurements
  • Air floating vibration isolation platform based on magnetic levitation zero position standard and laser auto-collimation measurements
  • Air floating vibration isolation platform based on magnetic levitation zero position standard and laser auto-collimation measurements

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Embodiment Construction

[0028] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

[0029] An air-floating vibration-isolation platform based on maglev zero reference and laser self-collimation measurement, the air-floating vibration-isolation platform body 6 is arranged on three or more uniformly distributed vibration isolators 4, and the vibration isolators 4 Configured on the base 5, the vibration isolator 4 is composed of a vibration isolator base 4a, a vibration isolator bracket 4b and a vibration isolator table 4c, and the vibration isolator table 4c is installed in the vibration isolator base 4a The vibration isolator support 4b is arranged on the outer side of the vibration isolator base 4a, and the vertical displacement actuator 8 is arranged between each vibration isolator 4 and the air-floating vibration isolation platform body 6, and the vertical displacement is executed The device 8 adopts a vertically placed linear voice c...

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Abstract

The invention discloses an air floating vibration isolation platform based on the magnetic levitation zero position standard and laser auto-collimation measurements and belongs to the tools of ultra precise measurements and ultra precise machining. A vibration isolator air floating isolation platform body with three or more than three static pressure air floating structures and a load thereof are adopted. A beam splitter prism and a photoelectric detector are adopted to achieve monitoring the six degrees of freedom gesture of the platform, and an actuator is displaced vertically between the vibration isolator and the platform body so as to achieve regulating the three degrees of freedom gesture of the platform. In the device, detecting effects of the vibrations of the ground to reference beams can be effectively isolated through zero position standard devices supported by a magnetic levitation type absorber, and the stability of the laser beam zero position standard is improved. The photoelectric detector is adopted to detect the flat float and the corner float of the reference beams, and a pair of wedge angle prisms is used for regulating the flat float and the corner float of the reference beams, wherein the wedge angle prisms are capable of regulating relative location spaces and angles. The correction of the reference beams can be achieved, and the vibration isolation performance of the platform can be improved remarkably.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-floating vibration-isolation platform based on maglev zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. The application of high-quality horizontal attitude air bearing vibration isolation platform is very extensive. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of machinery and equipment and the performance of instruments and instruments, and will directly affect the air flotation vibrat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D3/12F16F15/02F16F15/03G01B11/00
Inventor 王雷谭久彬赵勃
Owner HARBIN INST OF TECH
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