Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement
A technology of zero reference and vibration isolation platform, which is applied in the direction of measuring device, optical device, vibration suppression adjustment, etc., can solve the problem that there is no absolute zero reference, the system response speed is slow, and the vibration isolation platform cannot obtain high-level vibration isolation performance and other issues to achieve the effect of improving stability and vibration isolation performance
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[0029] The following describes the embodiments of the present invention in detail with reference to the accompanying drawings:
[0030] A gas-magnetic vibration isolation platform based on air-floating zero reference and laser self-collimation measurement. The gas-magnetic vibration isolation platform body 6 is configured on three or more evenly distributed vibration isolators 4. 4 is arranged on a base 5. The vibration isolator 4 is composed of a vibration isolator base 4a, a vibration isolator bracket 4b, and a vibration isolator table 4c. The vibration isolator table 4c is installed on the vibration isolator base 4a. Inside, the isolator bracket 4b is arranged on the outer side of the isolator base 4a, and the vertical displacement actuator 8 and the horizontal displacement actuator 9 are arranged between each isolator 4 and the gas-magnetic vibration isolation platform body 6. The vertical displacement actuator 8 adopts a linear voice coil motor placed vertically, and the lin...
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