Air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement

Abstract

An air spring vibration isolation platform based on floatation zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure air spring structure to support an air spring vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a horizontal displacement executer between the vibration isolators and the platform body to achieve three degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by a floatation absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The air spring vibration isolation platform adopts a photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air spring vibration isolation platform based on air-floating zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. High-quality horizontal attitude air spring vibration isolation platform is widely used. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of the machine equipment and the performance of the instruments, and will directly affect the air spring vibration isolation The damping performan...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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