Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement

Abstract

The invention discloses a gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static gas floating structures are adopted to support a gas floating vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by an air spring-type vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.

Description

technical field [0001] The invention belongs to ultra-precision measurement and ultra-precision processing equipment, and mainly relates to an air-floating vibration-isolation platform based on air spring zero reference and laser self-collimation measurement. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision processing, a platform with a high-quality horizontal attitude is the basic guarantee for precision measurement and large-scale integrated circuit manufacturing. The application of high-quality horizontal attitude air bearing vibration isolation platform is very extensive. In factories related to biological science, electron optics, precision machining, physical and chemical experiments and their research, the horizontal attitude control of the platform will affect the measurement experiment results of machinery and equipment and the performance of instruments and instruments, and will directly affect the air flotation vi...

AI Technical Summary

Problems solved by technology

The problems of this method are: 1) the workbench does not have the function of attitude adjustment; 2) the feedback signal of the position sensor is a relative quantity, there is no absolute zero reference, and the position of the workbench cannot be precisely positioned

The problems with this solution are: 1) In the disclosed technical solution, the vibration isolation platform cannot achieve precise positioning; 2) The attitude of the vibration isolation platform is adjusted by charging and deflation of the air spring, and the response speed of the system is slow

[0008] 1. The measurement of the vibration isolation platform is relative position, there is no absolute zero reference, so it is impossible to accurately locate the position of the vibration isolation platform;

[0009] 2. There is no high-precision attitude control scheme for the vibration isolation platform, so the vibration isolation platform cannot obtain high-level vibration isolation performance

Since the platform body is a displacement change in six degrees of freedom, and each degree of freedom interferes with each other, the image-based measurement method cannot be realized; and the method based on laser detection is affected by the drift of the laser itself, and it is difficult to achieve high-precision measurement.

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