Experimental device of compact magnetic levitation worktable

Abstract

An experimental device of a compact magnetic levitation worktable comprises a stator portion and a rotor portion. The stator portion comprises a base and a cylindrical stator housing arranged on the base, and a circular top cap is arranged at the top end of the stator housing. The rotor portion comprises a rotor arranged in the stator housing, a support column is fixed on the rotor and penetrates the top cap, and an objective table is arranged at the top of the support column. A plurality of first electromagnets used for vertical driving and a plurality of first eddy current sensors used for detecting vertical displacement are arranged on the top cap, and a plurality of second electromagnets used for horizontal driving and a plurality of second eddy current sensors used for detecting horizontal displacement are arranged on the side wall of the stator housing. The experimental device suitable for precise positioning magnetic levitation worktables is designed in order to meet the requirement on ultraprecise positioning, can be used for positioning of lithography machine wafer stages, can also be used for laser processing or other occasions needing micro-motion worktables, and is particularly suitable for occasions needing vacuum and free of friction.

Description

technical field [0001] The invention belongs to the technical field of precision machining and testing equipment, and in particular relates to an experimental device of a compact magnetic levitation workbench. Background technique [0002] Precision motion platforms are widely used in integrated circuit manufacturing, micro-mechanical assembly, biological cell operations, ultra-precision machining and measurement, and micro-surgery. However, the traditional superimposed two-dimensional positioning platform cannot get rid of its essential shortcomings: low positioning accuracy, slow response speed, high manufacturing cost, and cannot be used in a vacuum ultra-clean environment, etc. Common alternatives currently include: piezoelectric precision motion platforms, air-floating precision motion platforms, and magnetic levitation precision motion platforms. [0003] Piezoelectric precision motion platforms have high static stiffness and fast response, and are often used in high-...

AI Technical Summary

Problems solved by technology

However, the traditional superimposed two-dimensional positioning platform cannot get rid of its essential shortcomings: low positioning accuracy, slow response speed, high manufacturing cost, and cannot be used in a vacuum ultra-clean environment, etc.

But this type of platform cannot be used in a vacuum environment

Coupled with its low rigidity, easy to cause high-frequency vibration and other shortcomings, it is difficult to meet the needs of high-precision positioning

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