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Flatness testing device and testing method thereof

A detection device and detection method technology, applied in the direction of measurement device, optical device, instrument, etc., can solve problems such as affecting surface quality, decreasing detection accuracy, and scratching the object to be tested.

Active Publication Date: 2016-05-11
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, the detection accuracy of the platform and the gap gauge will inevitably decrease after a long period of use, and it may also cause scratches on the surface of the object to be measured, thereby affecting the surface quality

Method used

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  • Flatness testing device and testing method thereof
  • Flatness testing device and testing method thereof
  • Flatness testing device and testing method thereof

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no. 1 example

[0027] Please refer to figure 1 and figure 2 ,in figure 1 A schematic block diagram showing a flatness detection device according to an embodiment of the present invention, figure 2 An internal schematic diagram of the carrying platform in an embodiment is shown. exist figure 1 Among them, the flatness detection device 100 includes a carrying platform 110 , a light emitting module 120 , a light receiving module 130 , an image processing module 140 and a comparison module 150 . The carrying platform 110 has a plane 112 for carrying an object under test 10 and allowing a light L to pass through. The plane 112 includes a light-transmitting part, such as a hollow part, transparent glass or acrylic, which is used as a reference plane for flatness detection. The carrying platform 110 is a hollow body below the plane 112 for placing a light emitting module 120 such as a light emitting diode array or other light emitting elements 122 . Such as figure 2 As shown, for example,...

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Abstract

A flatness detection device includes a carrying platform, a light emitting module, a light receiving module, an image processing module and a comparison module. The carrying platform has a flat surface for carrying an object to be measured and for allowing light to penetrate. The light-emitting module is arranged in the carrying platform and emits light toward the plane. The light emitted from the side of the object to be measured close to the plane and the plane generates a detection light. The light receiving module is located on one side of the carrying platform to receive the detection light and generate an image signal. The image processing module is used to process image signals to measure a gap height between the side of the object to be measured close to the plane and the plane. The comparison module outputs a detection signal based on the comparison result between the gap height and a standard value to determine whether the gap height meets the standard.

Description

technical field [0001] The invention relates to a flatness detection device and a detection method thereof, and in particular to a detection device and a detection method for judging the surface flatness of a workpiece to be measured by optical image signals. Background technique [0002] In the traditional flatness detection method, most of them use the platform and gap ruler for manual detection. The flatness testing method is as follows: first place the object to be tested on a verified reference platform, and then the operator uses a standard gap gauge to insert the gap between the object to be tested and the platform to check whether the flatness is qualified . However, using this method to detect the flatness of the object under test is limited by the minimum unit of the gap ruler being 0.1 mm (100 microns), so its accuracy can generally only reach 0.1 mm, and the detection process needs to be judged by the operator, so There will be inconsistencies in standards. In...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/30
Inventor 黄国唐蔡雅惠吕尚杰张津魁郑智杰李韦辰
Owner IND TECH RES INST