Split pupil laser confocal Brillouin-Raman spectroscopy measurement method and device

A Raman spectroscopy and measurement method technology, applied in the field of microscopic spectroscopy imaging, can solve the problems of reducing the spatial resolution capability of confocal Raman spectroscopy detection, stray light intensity, sample defocusing, etc., to overcome the interference of focal surface scattered light, Strong anti-scattering ability and the effect of improving the signal-to-noise ratio
CN103884704BActive Publication Date: 2016-08-17BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2016-08-17

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Abstract

The invention relates to a spectral pupil laser confocal Brillouin-Raman spectrum measuring method and device and belongs to the technical field of microscopy spectral imaging. The device comprises a light source system for generating stimulating light beams, a measuring objective lens, a lighting pupil, a collecting pupil, a dichroic light splitting device, a spectroscope, an Raman spectrum detecting device, a Brillouin spectrum detecting device, a spectral pupil laser confocal detecting device, a three-dimensional scanning device, a displacement sensor and a data processing unit. The method and the device provided by the invention has the advantages that the abandoned rayleigh scattering light in confocal Raman spectrum detection is utilized to build a spectral pupil confocal microimaging system to realize the high-resolution imaging of the three-dimensional geometric position of a sample, the basic property and multiple cross effects of a substance are obtained by detecting the abandoned brillouin scattering light in confocal Raman spectrum detection and further the stress, elastic parameters and density of a material can be measured; the advantages of the confocal Raman spectrum detection technology and the confocal Brillouin spectrum detection technology are utilized to complement each other, and the comprehensive measurement and decoupling of multiple property parameters of the material are realized.
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Description

technical field

[0001] The invention belongs to the field of micro-spectral imaging technology, combines confocal microscopic technology and spectral detection technology, and relates to a method and device for measuring split-pupil laser confocal Brillouin-Raman spectroscopy, which can be used for micro-area multi-spectrum multi-spectrum measurement of samples. Comprehensive testing of performance parameters and high-resolution imaging. technical background

[0002] When light passes through the medium, the medium particles are affected by the light wave, transition from one quantum state to another quantum state, and radiate scattered waves at the same time. Different energy level transitions produce Rayleigh scattering and anti-Stokes scattering respectively. According to the degree of change with the wavelength of the incident light, light scattering is divided into: Rayleigh scattering (Rayleigh), Raman scattering (Raman) and Brillouin scattering (Brillouin).

[0003] ...

Claims

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