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Method of adjusting frequency of resonation device and method of manufacturing resonation device

A vibration device and frequency adjustment technology, applied in power oscillators, electrical components, output stability, etc., can solve the problems of inability to obtain frequency accuracy, large deviation of frequency-temperature characteristics, and reduced production efficiency.

Inactive Publication Date: 2015-09-30
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, even if the heating temperature of the heating element is set according to the frequency adjustment result of the quartz vibrator to obtain the desired frequency accuracy, the required frequency accuracy may not be obtained.
[0007] In this case, for example, it is necessary to adjust the heating condition of the heating element for each individual OCXO. However, when the frequency-temperature characteristics of each individual OCXO vary greatly, it is necessary to perform operations such as changing the setting of the heating condition for each individual OCXO. May reduce productivity

Method used

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  • Method of adjusting frequency of resonation device and method of manufacturing resonation device
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  • Method of adjusting frequency of resonation device and method of manufacturing resonation device

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Embodiment Construction

[0068] Hereinafter, preferred embodiments of the present invention will be described in detail using the drawings. In addition, the embodiment described below does not unduly limit the content of the present invention described in the claims. In addition, not all structures described below are essential technical features of the present invention.

[0069] In addition, in the following, as the vibrating device of the present invention, an oven-type quartz oscillator (OCXO) is used as an example for description, but the vibrating device of the present invention may also be other types of devices including heating elements and vibrating pieces, for example, other than OCXO Other than oscillators, inertial sensors (acceleration sensors, gyro sensors, etc.), force sensors (tilt sensors, etc.) as sensors for detecting physical quantities.

[0070] 1. Vibration device

[0071] First, a resonator device according to this embodiment will be described with reference to the drawings. ...

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Abstract

A method of adjusting a frequency of a resonation device including a resonator element and a heating element includes performing the frequency adjustment of the resonator element while heating the resonator element by the heating element.

Description

technical field [0001] The present invention relates to a frequency adjustment method of a vibrating device and a manufacturing method of the vibrating device. Background technique [0002] A crystal oscillator is known as a vibrating device used as a reference frequency signal source of communication equipment, a measuring instrument, or the like. It is generally required that the quartz oscillator has high precision and stable output frequency. A quartz oscillator is, for example, a structure in which a quartz vibrating plate and a circuit for oscillating the quartz vibrating plate are arranged in a container, and frequency adjustment of the quartz vibrating plate is required in order to achieve high precision and stabilize an output frequency. [0003] For example, Patent Document 1 discloses a method of disposing a piezoelectric vibrating element (piezoelectric vibrating reed) on a chip substrate on which an IC circuit is formed, and adjusting the frequency of the piezo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/19H03H9/08H03H3/02
CPCH03B1/02Y10T29/4913H03L1/028H03L1/022
Inventor 矶畑健作
Owner SEIKO EPSON CORP