Z-axis magnetic field loading device
A loading device and magnetic field technology, applied in the field of magnetic sensors, can solve problems such as measurement difficulties
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[0018] The surface acoustic wave sensor of the present invention will be described in detail below with reference to the accompanying drawings.
[0019] ginseng Figure 1-3 Shown is a Z-axis magnetic field loading device 100 of the present invention, which includes a surface acoustic wave substrate 10 made of silicon-doped material, and a plurality of magnetostrictive film layers 20 stacked on the surface acoustic wave substrate 10 . The material of the magnetostrictive film layer 20 can be FeCoSiB, FeBSiC, FeGa, FeGaB, CoFe, CoFeB, NiFe and other iron-based alloy single-phase materials or one of composite materials, which has high magnetic permeability, high magnetostriction coefficient, Features of low coercive force and low saturation magnetic field. Wherein the plurality of magnetostrictive film layers 20 are arranged separately from each other and form the first groove 21 , the Z-axis magnetic field loading device 100 further includes a magnetic flux guide 30 disposed ab...
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