A High-Precision Roll Angle Interferometry Device Based on Blazed Grating

Abstract

The invention relates to a high-precision roll angle interferometric measurement device based on blazed gratings, which includes a dual-frequency laser source, a blazed grating wedge-shaped flat plate moving together with a measured piece, an optical interference device and a phase detection device. The dual-frequency laser outputs an incident beam containing two components with different frequencies and orthogonal linear polarization directions to the optical interference device. Under the action of the optical interference device, the incident beam is reflected twice by the blazed grating wedge-shaped plate to form a spatially parallel four A measurement beam is finally formed in the interference device to output an interference beam to the phase detection device. The phase displacement of the measurement beam is detected by the phase detection device, and the roll angle is determined according to the relationship between the phase displacement and the roll angle of the wedge-shaped plate. The invention has strong anti-interference ability and high measurement precision; the optical structure is simple, the optical elements are few, the angle measurement resolution can reach sub-micro radians, and different precision measurement requirements can be met by using gratings with different grating constants.

Description

technical field [0001] The invention relates to a photoelectric measurement technology, in particular to a high-precision roll angle interference measurement device based on a blazed grating. Background technique [0002] As the key equipment in the field of precision machinery manufacturing, the precise measurement of the geometric position of CNC machine tools and machining centers is the basic guarantee of machining accuracy. As a crucial link in the field of precision machining and precision measurement, the precision motion system directly affects the accuracy of the processed workpiece. Therefore, improving the accuracy of the motion positioning system has become a key task in the development of tools, machine tools and even the manufacturing industry. [0003] In recent years, the precision requirements for ultra-precise displacement are getting higher and higher. In the grating scribing table and various large-scale precision scanning positioning devices, such as sc...

AI Technical Summary

Problems solved by technology

The measurement method based on the wedge-shaped flat plate [Zhang Zhuo et al. Grating wedge-shaped flat plate and the angle measuring device using the flat plate, Chinese Patent No.: 200410013761.7, 2004] can realize a wide range of roll angle measurement, but it uses a wedge-shaped flat plate to work, pitching and yaw errors are difficult to eliminate

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