A kind of radio frequency identification label preparation method based on film technology

Abstract

A film process-based preparation method for a radio frequency identification tag, wherein the radio frequency identification tag mainly comprises an antenna, an analog front end, a clock and digital logic circuit, and an EEPROM memory circuit, wherein the EEPROM memory circuit comprises a storage device and a peripheral read and write circuit, the antenna mainly comprises metal coils, the analog front end and the clock and digital logic circuit comprise conventional thin film transistors, and the EEPROM memory circuit mainly comprises conventional thin film transistors and memory thin film transistors. Provided is a method that employs the film process to integrally prepares, on the same substrate, the entire radio frequency identification tag comprising four parts: an antenna, an analog front end, a clock and digital logic circuit, and an EEPROM memory circuit. The method is capable of overcoming the drawbacks of traditional RFID tags, wherein, among others, the cost of integration between IC chips and external antennae is high, and the process is complex, thereby reducing costs.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuits, in particular to a method for preparing a radio frequency identification tag based on a thin film process. Background technique [0002] Radio Frequency Identification (RFID: Radio Frequency Identification) is a key technology to realize the Internet of Things, widely used in various industries such as production, retail, logistics, transportation, and finance. A typical RFID system architecture is mainly composed of three parts: application system, reader and RFID tag. The application system is responsible for data processing, transmission and control. The reader is mainly responsible for two-way communication with the electronic tag, and at the same time accepts control instructions from the application system. The RFID tag has a unique electronic code and stores the relevant information of the identified object, and is the real data carrier of the radio frequency id...

AI Technical Summary

Problems solved by technology

But for radio frequency identification tags, it generally includes four parts: antenna, analog front-end circuit, clock and digital logic circuit and EEPROM storage circuit, and for thin film technology, it is used to prepare analog front-end circuit and clock and digital logic The structure of the conventional thin film transistor of the circuit is quite different from the structure of the storage thin film transistor used to prepare the storage device, so it is difficult to integrate the two on the same substrate with the same process, that is, in the same It is very difficult to integrate an RFID tag including antenna, analog front-end circuit, clock and digital logic circuit and EEPROM storage circuit on a substrate.

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