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A wafer center positioning device

A positioning device and wafer center technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve problems such as inconvenient operation and complex structure, and achieve the effect of simple operation, simple structure, and successful positioning

Active Publication Date: 2018-11-06
CETC BEIJING ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The embodiment of the present invention provides a wafer center positioning device to solve the problems of complex structure and inconvenient operation of the existing wafer center positioning device

Method used

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  • A wafer center positioning device
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Embodiment Construction

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0025] see figure 1 , figure 1 The front view of the wafer centering device of the present invention is shown, and the wafer centering device includes: a center plate 1 arranged horizontally; the center plate 1 is fixed on the first fixed plate 15, and the center plate 1 arranged parallel to the center plate 1 is used to place the wafer The wafer table 2 is located above the center plate 1; on the lower surface of the wafer table 2, a vertical first drive s...

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Abstract

The invention provides a wafer center positioning device. The wafer center positioning device includes: a horizontally arranged central disk; a wafer bearing table used for placing a wafer, the wafer bearing table being arranged parallel to the central disc and located above the central disc, and a lower surface and a central position of the wafer bearing table being provided with a vertical first driving shaft; a plurality of eccentric discs arranged parallel to the central disc, located above the central disc and uniformly distributed in the periphery of the wafer bearing table, an edge of each eccentric disc being provided with a vertical eccentric finger, and a lower surface of each eccentric disc being provided with a vertical second driving shaft; a first driving mechanism connected with the first driving shaft; and a second driving mechanism connected with a second driving shaft of each eccentric disc. The wafer center positioning device solves the problems that an existing device for positioning of a wafer center is complicated in structure and inconvenient to operate.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of semiconductors, and more specifically, to a wafer center positioning device. Background technique [0002] In the manufacturing process of modern semiconductor special equipment, it is a key technology to realize the automatic centering of the wafer. In modern production equipment, the common device for positioning the center of the wafer is the center of rotation. However, the structure of the existing rotation center positioning device is relatively complicated, the rotation control is difficult, and there is a problem that it is difficult to control, which leads to troublesome operation of the center positioning of the wafer. Contents of the invention [0003] An embodiment of the present invention provides a wafer center positioning device to solve the problems of complex structure and inconvenient operation of existing wafer center positioning devices. [0004] An embodiment...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/68
CPCH01L21/67259H01L21/681
Inventor 刘宇光衣忠波杨生荣张景瑞贺东葛白阳
Owner CETC BEIJING ELECTRONICS EQUIP