Liquid knife cleaning device and liquid knife
A cleaning device and cleaning liquid technology, which are applied to the cleaning method using liquid, the device for coating liquid on the surface, the spraying device, etc., can solve the problems affecting the operation of equipment and the risk of product failure, and achieve the effect of improving the operation.
Active Publication Date: 2016-06-29
BOE TECH GRP CO LTD +1
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Problems solved by technology
However, this affects the operation of the equipment, and there is a risk of defective products
Method used
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[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.
[0038] figure 1 and figure 2 Shown is a schematic structural view of a conventional cleaning device or a liquid knife of a developing device. The main material of the liquid knife is SUS (stainless steel), such as figure 1 and figure 2 As shown, the liquid knife 1 has a slit-shaped knife edge 2, and the width of the slit of the knife edge 2 of the entire liquid knife 1 must be roughly the sa...
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The invention provides a liquid knife cleaning device and a liquid knife. The liquid knife cleaning device comprises a frame body, a cleaning blade as well as a moving mechanism, wherein the frame body is arranged on the liquid knife, and can perform reciprocating movement in the extension direction of the knife edge; the cleaning blade extends into the knife edge of the liquid knife, can be driven by the frame body to perform reciprocating movement in the knife edge to clean the knife edge, and is arranged on the frame body; the moving mechanism is used for driving the frame body to perform reciprocating movement on the liquid knife in the extension direction of the knife edge; and the frame body is connected with the moving mechanism. A conventional manual cleaning method can be replaced by the liquid knife cleaning device provided by the invention. When the knife edge of the liquid knife is cleaned, the possibility of a bifurcated liquid curtain can be reduced, so that the possibility of such developing mura is reduced, the equipment activation ratio is improved, and other problems such as a discontinuous tape-out process are solved.
Description
technical field [0001] The invention relates to the field of display technology, in particular to a liquid knife cleaning device and a liquid knife. Background technique [0002] TFT-LCD (tinfilmtransistor-liquidcrystaldisplay, thin film transistor liquid crystal display), the main purpose of the color film factory is to coat different colors of photoresist on the glass substrate, and produce graphics of different colors through exposure, development, post-baking and other processes. The purpose of the development process of the color film factory is to remove the unexposed photoresist on the substrate, retain the exposed photoresist pattern, rinse the exposed glass substrate with diluted potassium hydroxide (KO) solution, and then wash it with pure water , to remove the KO residue. A liquid knife device is added to the connection area between the developing section and the cleaning section of the developing equipment to quickly remove the KO residual liquid and developing ...
Claims
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IPC IPC(8): B08B1/00B08B3/02
CPCB08B3/02B08B1/165B08B1/30B05B1/044B05C5/005B05B15/5223B05C5/0254B08B9/00
Inventor 姚亮黄林周伟杨玉林己燮陈而论袁晨徐立铭谢呈男
Owner BOE TECH GRP CO LTD